Department of Electronic Engineering

Research Output

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2011

Enzyme biosensor based on plasma-polymerized film-covered carbon nanotube layer grown directly on a flat substrate

Muguruma, H., Hoshino, T. & Matsui, Y., 2011 Jul 27, In : ACS Applied Materials and Interfaces. 3, 7, p. 2445-2450 6 p.

Research output: Contribution to journalArticle

25 Citations (Scopus)

Garnet photonics toward developing laser diode integrated with optical isolator with Si guiding layer

Yokoi, H., Igarashi, S., Uchiumi, Y. & Tani, K., 2011 Mar 1, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 8, 3, p. 1071-1074 4 p.

Research output: Contribution to journalArticle

Reduction of threading dislocations in GaN on in-situ meltback-etched Si substrates

Ishikawa, H. & Shimanaka, K., 2011 Jan 15, In : Journal of Crystal Growth. 315, 1, p. 196-199 4 p.

Research output: Contribution to journalArticle

7 Citations (Scopus)
2010

Comparison of lifetime improvements in electromigration between Ti barrier metal and chemical vapor deposition Co capping

Kakuhara, Y., Yokogawa, S. & Ueno, K., 2010 Apr 1, In : Japanese Journal of Applied Physics. 49, 4 PART 2, 04DB08.

Research output: Contribution to journalArticle

5 Citations (Scopus)

Grain growth enhancement of electroplated copper film by supercritical annealing

Ueno, K., Shimada, Y., Yomogida, S., Akahori, S., Yamamoto, T., Yamaguchi, T., Aoki, Y., Matsuyama, A., Yata, T. & Hashimoto, H., 2010 May, In : Japanese Journal of Applied Physics. 49, 5 PART 3, p. 05FA081-05FA086

Research output: Contribution to journalArticle

2 Citations (Scopus)

Interferometric optical isolator with air/Si/magnetic-garnet waveguide operated in unidirectional magnetic field

Yokoi, H., Igarashi, S. & Uchiumi, Y., 2010 May 1, In : Japanese Journal of Applied Physics. 49, 5 PART 1, p. 580021-580022 2 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Plasma polymerization for protein patterning: Reversible formation with fullerene modification

Takahashi, H., Murata, N. & Muguruma, H., 2010 Jan 1, In : IEICE Transactions on Electronics. E93-C, 2, p. 211-213 3 p.

Research output: Contribution to journalArticle

Plasma-polymerized films for biochip design

Muguruma, H., 2010 Feb 22, In : Plasma Processes and Polymers. 7, 2, p. 151-162 12 p.

Research output: Contribution to journalArticle

26 Citations (Scopus)

Protein patterning on functionalized surface prepared by selective plasma polymerization

Muguruma, H. & Takahashi, H., 2010 Dec 25, In : Surface and Coatings Technology. 205, 7, p. 2490-2494 5 p.

Research output: Contribution to journalArticle

7 Citations (Scopus)
2009

Analysis of terahertz oscillator using negative differential resistance dual-channel transistor and integrated antenna

Furuya, K., Numakami, O., Yagi, N., Hori, S., Sugaya, T., Komori, K., Mori, M., Okano, Y., Muguruma, H. & Asada, M., 2009 Apr 1, In : Japanese Journal of Applied Physics. 48, 4 PART 2, 04C146.

Research output: Contribution to journalArticle

3 Citations (Scopus)

Application of novel ultrasonic cleaning equipment using waveguide mode for post-chemical-mechanical-planarization cleaning

Suzuki, K., Han, K., Okano, S., Soejima, J. & Koike, Y., 2009 Jul 1, In : Japanese Journal of Applied Physics. 48, 7 PART 2, 07GM04.

Research output: Contribution to journalArticle

5 Citations (Scopus)

Degradation of electromigration lifetime of Cu/Low-k interconnects by postannealing

Kakuhara, Y. & Ueno, K., 2009 Apr 1, In : Japanese Journal of Applied Physics. 48, 4, 046507.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Fabrication of electroless CoWP/NiB diffusion barrier layer on SiO 2 for ULSI Devices

Osaka, T., Aramaki, H., Yoshino, M., Ueno, K., Matsuda, I. & Shacham-Diamand, Y., 2009 Aug 7, In : Journal of the Electrochemical Society. 156, 9, p. H707-H710

Research output: Contribution to journalArticle

21 Citations (Scopus)

Novel ultrasonic cleaning equipment using waveguide mode

Suzuki, K., Han, K., Okano, S., Soejima, J. & Koike, Y., 2009 Jul 1, In : Japanese Journal of Applied Physics. 48, 7 PART 2, 07GM05.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Sputter-Deposited Si layer for optical isolator with si guiding layer

Yokoi, H., Sasaki, K. & Aiba, T., 2009 Jun 1, In : Japanese Journal of Applied Physics. 48, 6, 062202.

Research output: Contribution to journalArticle

10 Citations (Scopus)

Suppression of electromigration early failure of Cu/Porous low-k interconnects using dummy metal

Kakuhara, Y., Yokogawa, S., Hiroi, M., Takewaki, T. & Ueno, K., 2009 Dec 1, In : Japanese Journal of Applied Physics. 48, 9 Part 1, p. 965041-965045 5 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)
2008

Amperometric biosensor based on glucose dehydrogenase and plasma-polymerized thin films

Hiratsuka, A., Fujisawa, K. & Muguruma, H., 2008 Apr, In : Analytical Sciences. 24, 4, p. 483-486 4 p.

Research output: Contribution to journalArticle

11 Citations (Scopus)

An amperometric biosensor based on a composite of single-walled carbon nanotubes, plasma-polymerized thin film, and an enzyme

Muguruma, H., Shibayama, Y. & Matsui, Y., 2008 Jan 18, In : Biosensors and Bioelectronics. 23, 6, p. 827-832 6 p.

Research output: Contribution to journalArticle

54 Citations (Scopus)

An amperometric biosensor for glucose based on a composite electrode of glucose dehydrogenase, carbon nanotubes, and plasma-polymerized thin films

Muguruma, H., Yoshida, S., Urata, M., Fujisawa, K. & Matsui, Y., 2008 Aug, In : Electrochemistry. 76, 8, p. 545-548 4 p.

Research output: Contribution to journalArticle

Open Access
5 Citations (Scopus)
1 Citation (Scopus)

Calculation of nonreciprocal phase shift in magneto-optic waveguides with Ce:YIG layer

Yokoi, H., 2008 Jan 1, In : Optical Materials. 31, 2, p. 189-192 4 p.

Research output: Contribution to journalArticle

18 Citations (Scopus)

Electromigration lifetime enhancement of CoWP capped Cu interconnects by thermal treatment

Kakuhara, Y., Kawahara, N., Ueno, K. & Oda, N., 2008 Jun 13, In : Japanese Journal of Applied Physics. 47, 6 PART 1, p. 4475-4479 5 p.

Research output: Contribution to journalArticle

9 Citations (Scopus)

Fabrication and characteristics of thin-film optical switches using fluorinated silicon oxide deposited by a liquid-phase technique

Takishita, I., Kurosu, K. & Homma, T., 2008 Nov 1, In : Optical Review. 15, 6, p. 265-268 4 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Magneto-optical isolator with silicon waveguides fabricated by direct bonding

Shoji, Y., Mizumoto, T., Yokoi, H., Hsieh, I. W. & Osgood, R. M., 2008 Mar 3, In : Applied Physics Letters. 92, 7, 071117.

Research output: Contribution to journalArticle

231 Citations (Scopus)

NADH sensing using a carbon nanotube electrode reinforced with a plasma-polymerized thin film

Matsui, Y., Hoshino, T., Yoshizawa, M. & Muguruma, H., 2008 Aug, In : Electrochemistry. 76, 8, p. 610-613 4 p.

Research output: Contribution to journalArticle

Open Access
6 Citations (Scopus)

Optimization of carbon nanotube layer formation on plasma-polymerized thin film for enzyme biosensor

Matsui, Y., Yoshizawa, M., Hoshino, T. & Muguruma, H., 2008 Dec 1, In : Sensors and Materials. 20, 6, p. 289-298 10 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)
4 Citations (Scopus)

Selective adsorption of an antibody onto a plasma-polymerized film for protein patterning

Hiratsuka, A., Murata, N., Muguruma, H. & Matsumura, K., 2008 Jun, In : IEICE Transactions on Electronics. E91-C, 6, p. 978-980 3 p.

Research output: Contribution to journalArticle

5 Citations (Scopus)

Sensitivity correction control of the ultrasonic sensor due to Doppler shift

Koike, Y. & Alzawa, S. I., 2008 May 23, In : Japanese Journal of Applied Physics. 47, 5 PART 2, p. 4041-4043 3 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Sulphur dioxide plasma modification on poly(methyl methacrylate) for fluidic devices

Hiratsuka, A., Fukui, H., Suzuki, Y., Muguruma, H., Sakairi, K., Matsushima, T., Maruo, Y. & Yokoyama, K., 2008 Mar 1, In : Current Applied Physics. 8, 2, p. 198-205 8 p.

Research output: Contribution to journalArticle

6 Citations (Scopus)
2007

Adsorption of antibody protein onto plasma-polymerized film characterized by atomic force microscopy and quartz crystal microbalance

Muguruma, H., Miura, S. & Murata, N., 2007 Mar, In : IEICE Transactions on Electronics. E90-C, 3, p. 649-651 3 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

A robust embedded ladder-oxide/Cu multilevel interconnect technology for 0.13 μm complementary metal oxide semiconductor generation

Oda, N., Ito, S., Takewaki, T., Shiba, K., Kunishima, H., Hironaga, N., Honma, I., Nanba, H., Yokogawa, S., Kameyama, A., Goto, T., Usami, T., Ohto, K., Kubo, A., Suzuki, M., Yamamoto, Y., Watanabe, S., Yamada, K., Ikeda, M., Ueno, K. & 1 others, Horiuchi, T., 2007 Mar 8, In : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 46, 3 A, p. 954-961 8 p.

Research output: Contribution to journalArticle

9 Citations (Scopus)

Behavior of reaction products during puddle development in fabrication of ultralarge-scale integrations

Eto, H., Ito, Y. & Homma, T., 2007 Aug 6, In : Journal of the Electrochemical Society. 154, 9, p. H764-H768

Research output: Contribution to journalArticle

12 Citations (Scopus)

Chip-level performance maximization using ASIS (application-specific interconnect structure) wiring design concept for 45 nm CMOS generation

Oda, N., Imura, H., Kawahara, N., Tagami, M., Kunishima, H., Sone, S., Ohnishi, S., Yamada, K., Kakuhara, Y., Sekine, M., Hayashi, Y. & Ueno, K., 2007 Apr, In : IEICE Transactions on Electronics. E90-C, 4, p. 848-855 8 p.

Research output: Contribution to journalArticle

5 Citations (Scopus)

Comparison of flow models for photoresist behavior at contact holes in thermal flow processes

Eto, H., Miyazaki, M., Kondoh, T., Shiobara, E., Ito, S. & Homma, T., 2007 Aug 31, In : Journal of the Electrochemical Society. 154, 10, p. H894-H898

Research output: Contribution to journalArticle

2 Citations (Scopus)

Diffusion-controlled size-selective chloride ion sensing in the presence of bromide ion using a thin, nanoporous, plasma-polymerized coating on an Ag/AgCl electrode

Muguruma, H., Sekikawa, T., Ueno, S. I. & Kubota, N., 2007 Jun 1, In : Thin Solid Films. 515, 17, p. 6978-6980 3 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)
1 Citation (Scopus)

Fabrication of Bi4Ti3O12 films on Pt substrates by inkjet printing

Yamaguchi, M., Yamamoto, A. & Masuda, Y., 2007 Aug, In : Journal of the Korean Physical Society. 51, 2 PART I, p. 747-750 4 p.

Research output: Contribution to journalArticle

6 Citations (Scopus)
2 Citations (Scopus)

Plasma-polymerized films for biosensors II

Muguruma, H., 2007 May 1, In : TrAC - Trends in Analytical Chemistry. 26, 5, p. 433-443 11 p.

Research output: Contribution to journalArticle

29 Citations (Scopus)

Time-dependent dielectric breakdown characterization of 90- and 65-nm-Node Cu/SiOC interconnects with via plugs

Ueno, K., Kameyama, A., Matsumoto, A., Iguchi, M., Takewaki, T., Oshida, D., Toyoshima, H., Kawahara, N., Asada, S., Suzuki, M. & Oda, N., 2007 Apr 5, In : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 46, 4 A, p. 1444-1451 8 p.

Research output: Contribution to journalArticle

8 Citations (Scopus)
2006

Carrier-envelope phase-stabilized chirped-pulse amplification system

Takamiya, H., Kakehata, M., Nishijima, K., Takada, H., Kobayashi, Y., Homma, T., Takahashi, H. & Torizuka, K., 2006 Nov 30, In : Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi). 157, 3, p. 35-42 8 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Coupling characteristics of three-guide tapered coupler for optical isolator with Si guiding layer

Yokoi, H., Shoji, Y., Suzuki, T., Nishimura, N. & Mizumoto, T., 2006 Aug 4, In : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 45, 8 A, p. 6323-6325 3 p.

Research output: Contribution to journalArticle

Electron transfer mediated biosensor with plasma-polymerized film containing redox site

Muguruma, H. & Uehara, H., 2006 Dec, In : IEICE Transactions on Electronics. E89-C, 12, p. 1781-1785 5 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)