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1989 …2020

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Article
2009

Micro-patterning of Siloxane Films by Proton Beam Writing

Nishikawa, H., Tsuchiya, R., Yasukawa, T., Kaneko, T., Furuta, Y. & Ohishi, T., 2009 Jun 1, In : Journal of Photopolymer Science and Technology, Vol.22, pp.239-243(2009). 22, p. 239-243

Research output: Contribution to journalArticle

2008

Applications of Microstructures Fabricated by PBW to Electric-Micro Filters (Invited)

Nishikawa, H., Seki, Y., Furuta, Y., Uchiya, N., Nakata, T., Watanabe, T., Nakao, R., S.Uchida, S. U., Haga, J., Satoh, T., Ohkubo, T., Ishii, Y. & Kamiya, T., 2008 Jul 24, In : Book of Abstracts, 11th International Conference on Nuclear Microprobe Technology and Applications (20-25 July, 2008, Debrecen, Hungary). p. 61

Research output: Contribution to journalArticle

Fabrication and evaluation of 3D-DEP devices utilized by proton beam writing

Furuta, Y., Nishikawa, H., Satoh, T., Ishii, Y., Kamiya, T., Nakao, R. & Uchida, S., 2008 Sep 1, In : 34th International Conference on Micro and Nano Engineering (15 -18 September 2008 Athens - Greece).

Research output: Contribution to journalArticle

Ni electroplating on a resist micro-machined by proton beam writing

Uchiya, N., Furuta, Y., Nishikawa, H., Watanabe, T., Haga, J., Satoh, T., Oikawa, M., Ishii, Y. & Kamiya, T., 2008 Oct 1, In : Microsystem Technologies. 14, 9-11, p. 1537-1540 4 p.

Research output: Contribution to journalArticle

15 Citations (Scopus)
2007

Correlation between the luminescence properties and the surface structures of submicron silica particles

Inai, S., Harao, A. & Nishikawa, H., 2007 Apr 1, In : Journal of Non-Crystalline Solids. 353, 5-7, p. 510-513 4 p.

Research output: Contribution to journalArticle

6 Citations (Scopus)

Fabrication of 3-D Structures of Resist byProton Beam Writing

Furuta, Y., Uchiya, N., Nishikawa, H., Haga, J., Satoh, T., Oikawa, M., Ishii, Y. & Kamiya, T., 2007 May 29, In : The 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (USA, May 29-June 1, 2007).

Research output: Contribution to journalArticle

Fabrication of High-Aspect-Ratio Microstructures by Proton Beam Writing (PBW)

Uchiya, N., Furuta, Y., Nishikawa, H., Watanabe, T., Haga, J., Sato, T., Ishii, Y. & Kamiya, T., 2007 Jun 7, In : 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Abstracts (France, June 7-9, 2007). p. 201-202

Research output: Contribution to journalArticle

Fabrication of three-dimensional structures of resist by proton beam writing

Furuta, Y., Uchiya, N., Nishikawa, H., Haga, J., Sato, T., Oikawa, M., Ishii, Y. & Kamiya, T., 2007 Dec 19, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25, 6, p. 2171-2174 4 p.

Research output: Contribution to journalArticle

19 Citations (Scopus)

Micro-machining of resists on silicon by proton beam writing

Uchiya, N., Harada, T., Murai, M., Nishikawa, H., Haga, J., Sato, T., Ishii, Y. & Kamiya, T., 2007 Jul 1, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 260, 1, p. 405-408 4 p.

Research output: Contribution to journalArticle

42 Citations (Scopus)

Micro-photoluminescence study on defects induced by ion microbeam in silica glass

Murai, M., Nishikawa, H., Nakamura, T., Aiba, H., Ohki, Y., Oikawa, M., Sato, T. & Kamiya, T., 2007 Apr 1, In : Journal of Non-Crystalline Solids. 353, 5-7, p. 537-541 5 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Modification of structural and optical properties of silica glass induced by ion microbeam

Nishikawa, H., Murai, M., Nakamura, T., Ohki, Y., Oikawa, M., Sato, T., Sakai, T., Ishii, Y. & Fukuda, M., 2007 Aug 5, In : Surface and Coatings Technology. 201, 19-20 SPEC. ISS., p. 8185-8189 5 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)

Spatial distribution of irradiation effects on silica glass induced by 15-MeV oxygen ion microbeam

Nishikawa, H., Fukagawa, K., Nakamura, T., Ohki, Y., Oikawa, M., Kamiya, T. & Arakawa, K., 2006 Jan 1, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 242, 1-2, p. 437-440 4 p.

Research output: Contribution to journalArticle

8 Citations (Scopus)
2004

Effects of Ion Microbeam Irradiation on Silica Glass

Nishikawa, H., Fukagawa, K., Yanagi, T., Ohki, Y., Watanabe, E., Oikawa, M., Kamiya, T. & Arakawa, K., 2004 Mar 1, In : Transactions of the Materials Research Society of Japan. 29, p. 603-606

Research output: Contribution to journalArticle

Fabrication and Evaluation of Micrometer-scale Optical Elements using Three-dimensional Irradiation Effects Localized in Micro and Nano-scale Regions

Nishikawa, H., Fukagawa, K., Yanagi, T., Nakamura, T., Ohki, Y., Watanabe, E., Oikawa, M., Arakawa, K. & Kamiya, T., 2004 Oct 4, In : TIARA Annual Report 2003, JAERI-Review 2004-025. p. 234-236

Research output: Contribution to journalArticle

Proton Microbeam Irradiation Effects on Silica Glass

Nishikawa, H., Fukagawa, K., Yanagi, T., Ohki, Y., Watanabe, E., Oikawa, M., Kamiya, T. & Arakawa, K., 2004 Jul 21, In : Abstract Book of 1st International Workshop on Proton Beam Writing. p. 26

Research output: Contribution to journalArticle

Spatial distribution of irradiation effects on silica glass induced by ion microbeam

Nishikawa, H., Fukagawa, K., Yanagi, T., Ohki, Y., Watanabe, E., Oikawa, M., Kamiya, T. & Arakawa, K., 2004 Sep 5, In : Default journal. p. 87

Research output: Contribution to journalArticle

2002

Characterization of ion-implanted silica glass by vacuum ultraviolet absorption spectroscopy

Hattori, M., Nishihara, Y., Ohki, Y., Fujimaki, M., Souno, T., Nishikawa, H., Yamaguchi, T., Watanabe, E., Oikawa, M., Kamiya, T. & Arakawa, K., 2002 May, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 191, 1-4, p. 362-365 4 p.

Research output: Contribution to journalArticle

10 Citations (Scopus)

Evaluation of silica glasses implanted by high-energy ions using a UV-excited microspectroscopy

Yamaguchi, T., Watanabe, E., Souno, T., Nishikawa, H., Hattori, M., Ohki, Y., Kamiya, T. & Arakawa, K., 2002 May, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 191, 1-4, p. 371-374 4 p.

Research output: Contribution to journalArticle

Radiation effects and surface deformation of silica by ion microbeam

Nishikawa, H., Souno, T., Hattori, M., Nishihara, Y., Ohki, Y., Watanabe, E., Oikawa, M., Kamiya, T. & Arakawa, K., 2002 May 1, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 191, 1-4, p. 342-345 4 p.

Research output: Contribution to journalArticle

3 Citations (Scopus)
2001

Characterization of ion-implanted silica glass by vacuum  ultraviolet absorption spectroscopy

Hattori, M., Nishihara, Y., Ohki, Y., Fujimaki, M., Souno, T., Nishikawa, H., Yamaguchi, T., Watanabe, E., Oikawa, M., Kamiya, T. & Arakawa, K., 2001 Sep 3, In : Radiation Effects in Insulators, Paper No. P-H.3 (Lisbon, Portugal).

Research output: Contribution to journalArticle

Evaluation of silica glasses implanted by high-energy ions using a uv-excited microscopy

Yamaguchi, T., Watanabe, E., Souno, T., Nishikawa, H., Hattori, M., Ohki, Y., Kamiya, T. & Arakawa, K., 2001 Sep 3, In : Abstracts of Radiation Effects in Insulators.

Research output: Contribution to journalArticle

Evaluation of Three Dimensional Microstructures on Silica Glass Fabricated by Ion Microbeam

Nishikawa, H., Souno, T., Hattori, M., Nishihara, Y., Ohki, Y., Yamaguchi, T., Watanabe, E., Oikawa, M., Kamiya, T., Arakawa, K. & Fujimaki, M., 2001 Oct 1, In : JAERI-Review 2001, TIARA Annual Report 2000. p. 235-237

Research output: Contribution to journalArticle

1999

Characteristic red photoluminescence band in oxygen-deficient silica glass

Sakurai, Y., Nagasawa, K., Nishikawa, H. & Ohki, Y., 1999 Jul, In : Journal of Applied Physics. 86, 1, p. 370-373 4 p.

Research output: Contribution to journalArticle

36 Citations (Scopus)

Defects in thermal oxide studied by photoluminescence spectroscopy

Nishikawa, H., Stathis, J. H. & Cartier, E., 1999 Aug 30, In : Applied Physics Letters. 75, 9, p. 1219-1221 3 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)
42 Citations (Scopus)

Temperature dependence of the lifetime of 4.3-eV photoluminescence in oxygen-deficient amorphous SiO2

Seol, K. S., Fujimaki, M., Ohki, Y. & Nishikawa, H., 1999 Jan 1, In : Physical Review B. 59, p. 1590-1593

Research output: Contribution to journalArticle

21 Citations (Scopus)
1998

Structure and generation mechanisms of paramagnetic centers and absorption bands responsible for Ge-doped SiO2 optical-fiber gratings

Fujimaki, M., Watanabe, T., Katoh, T., Karasawa, T., Miyazaki, N., Ohki, Y. & Nishikawa, H., 1998 Feb 1, In : Physical Review B. 57, p. 3920-3926

Research output: Contribution to journalArticle

86 Citations (Scopus)

Structures and generation mechanisms of paramagnetic centers and absorption bands responsible for Ge-doped optical-fiber gratings

Fujimaki, M., Watanabe, T., Katoh, T., Kasahara, T., Miyazaki, N., Ohki, Y. & Nishikawa, H., 1998 Jan 1, In : Physical Review B - Condensed Matter and Materials Physics. 57, 7, p. 3920-3926 7 p.

Research output: Contribution to journalArticle

86 Citations (Scopus)
1997

Changes in the optical properties of Ge-doped silica glass during exposure to a KrF excimer laser

Miyake, Y., Nishikawa, H., Watanabe, E. & Ito, D., 1997 Dec 11, In : Journal of Non-Crystalline Solids. 222, p. 266-271 6 p.

Research output: Contribution to journalArticle

14 Citations (Scopus)

Energy states of Ge-doped SiO2 glass estimated through absorption and photoluminescence

Fujimaki, M., Ohki, Y. & Nishikawa, H., 1997 Feb 1, In : Journal of Applied Physics. 81, 3, p. 1042-1046 5 p.

Research output: Contribution to journalArticle

42 Citations (Scopus)

Energy states of Ge-doped SiO2 glass estimated through absorption and photoluminescence

Fujimaki, M., Ohki, Y. & Nishikawa, H., 1997 Feb 1, In : Journal of Applied Physics. 81, p. 1042-1046

Research output: Contribution to journalArticle

42 Citations (Scopus)
2 Citations (Scopus)

Luminescence properties of sol-gel synthesized silica glass induced by an ArF excimer

Mukasa, K., Ono, M., Wakabayashi, R., Ishii, K., Ohki, Y. & Nishikawa, H., 1997 Jan 1, In : Journal of Physics D: Applied Physics. 30, p. 283-285

Research output: Contribution to journalArticle

4 Citations (Scopus)

Luminescence properties of sol-gel synthesized silica glass induced by an ArF excimer laser

Mukasa, K., Ono, M., Wakabayashi, R., Ishii, K., Ohki, Y. & Nishikawa, H., 1997 Jan 21, In : Journal of Physics D: Applied Physics. 30, 2, p. 283-285 3 p.

Research output: Contribution to journalArticle

4 Citations (Scopus)

Photoluminescence of oxygen-deficient-type defects in a-SiO2

Nishikawa, H., Miyake, Y., Watanabe, E., Ito, D., Seol, K. S., Ohki, Y., Ishii, K., Sakurai, Y. & Nagasawa, K., 1997 Jan 1, In : Journal of Non-Crystalline Solids. 222, p. 221-227

Research output: Contribution to journalArticle

36 Citations (Scopus)

Relation between plasma-induced damage to SiO2 film and high energy particles in plasma processing

Tochikubo, F., Watanabe, T., Nishikawa, H., Watanabe, E., Ito, D., Okumura, T. & Kaibe, H., 1997 Jan 1, In : Memoirs of Faculty of Engineering. p. 21-30

Research output: Contribution to journalArticle

Thermal annealing behavior of defects induced by ion implantation in thermally grown SiO2 films

Seol, K. S., Karasawa, T., Ohki, Y., Nishikawa, H. & Takiyama, M., 1997 Jan 1, In : Microelectrons Engineering. 36, p. 193-195

Research output: Contribution to journalArticle

6 Citations (Scopus)

Thermal annealing behavior of defects induced by ion implantation in thermally grown SiO2 films

Seol, K. S., Karasawa, T., Ohki, Y., Nishikawa, H. & Takiyama, M., 1997 Jun, In : Microelectronic Engineering. 36, 1-4, p. 193-195 3 p.

Research output: Contribution to journalArticle

6 Citations (Scopus)
1996

Effect of implanted ion species on the decay kinetics of 2.7 eV photoluminescence in thermal SiO2 films

Seol, K. S., Ohki, Y., Nishikawa, H., Takiyama, M. & Hama, Y., 1996 Dec 1, In : Journal of Applied Physics. 80, 11, p. 6444-6447 4 p.

Research output: Contribution to journalArticle

48 Citations (Scopus)

Effect of implanted ion species on the decay of 2.7 eV photoluminescence in thermal

Seol, K. S., Ohki, Y., Nishikawa, H., Takiyama, M. & Hama, Y., 1996 Dec 1, In : Journal of Applied Physics. 80, p. 6444-6447

Research output: Contribution to journalArticle

Laser-power dependence of absorption changes in Ge-doped glass induced by a KrF excimer laser

Fujimaki, M., Yagi, K., Ohki, Y. & Nishikawa, H., 1996 Jan 1, In : Physical Review B - Condensed Matter and Materials Physics. 53, 15, p. 9859-9862 4 p.

Research output: Contribution to journalArticle

28 Citations (Scopus)

Laser-power dependence of absorption changes in Ge-doped SiO2 glass induced by a KrF excimer laser

Fujimaki, M., Yagi, K., Ohki, Y., Nishikawa, H. & Awazu, K., 1996 Apr 1, In : Physical Review B,. 53, p. 9859-9862

Research output: Contribution to journalArticle

28 Citations (Scopus)