• 2559 Citations
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1989 …2020

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Research Output

Review article
Review article

Challenges in the micromachining by proton beam writing and its applications

Nishikawa, H., 2008 Dec 1, In : IEEJ Transactions on Fundamentals and Materials. 128, 7, p. 461-466 6 p.

Research output: Contribution to journalReview article