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Research Output 1985 2019

  • 867 Citations
  • 17 h-Index
  • 94 Article
  • 29 Conference contribution
  • 1 Chapter
  • 1 Editorial
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1999
2 Citations (Scopus)

Low resistance copper via technology

Ueno, K., Donnelly, V. M., Tsuchiya, Y. & Aoki, H., 1999, Materials Research Society Symposium - Proceedings. Vol. 564. p. 521-533 13 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Copper
Cleaning
Plasmas
Contact resistance
Vapors