• Source: Scopus
  • Calculated based on no. of publications stored in Pure and citations from Scopus
1985 …2021

Research activity per year

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Search results

  • 2005

    Reliability of damascene copper interconnects

    Ueno, K., Ishigarni, T., Kakuhara, Y. & Kawano, M., 2005 Dec 1, p. 408-418. 11 p.

    Research output: Contribution to conferencePaperpeer-review

    1 Citation (Scopus)