Shigeki Matsuo

Research output

Research output per year 1992 1999 2000 2001 2002 2003 2004 2022

• 137 Article
• 27 Conference article
• 17 Conference contribution
• 3 Paper
• 6 More
  • 2 Review article
  • 1 Chapter
  • 1 Comment/debate
  • 1 Editorial
  • 1 Letter

Research output per year

Research output per year

Search results

• 2022

  Pulse-by-pulse optical observation of laser-irradiated thin glass substrate using oil-immersion microscopy

  Yanagisawa, Y. & Matsuo, S., 2022 Jan, In: Japanese Journal of Applied Physics. 61, 1, 010901.

  Research output: Contribution to journal › Article › peer-review

  Open Access

  • Laser pulses 100%
  • Microscopic examination 83%
  • submerging 78%
  • oils 69%
  • Glass 61%
• 2020

  Inscribing diffraction grating inside silicon substrate using a subnanosecond laser in one photon absorption wavelength

  Sugimoto, K., Matsuo, S. & Naoi, Y., 2020 Dec, In: Scientific Reports. 10, 1, 21451.

  Research output: Contribution to journal › Article › peer-review

  Open Access

  • Silicon 100%
  • Photons 87%
  • Lasers 66%
  2 Citations (Scopus)

• Pulse-by-pulse optical observation of growth of laser-induced periodic surface structure at oblique incidence

  Shibata, K. & Matsuo, S., 2020 Sep 1, In: Journal of Laser Micro Nanoengineering. 15, 2, p. 128-131 4 p.

  Research output: Contribution to journal › Article › peer-review

  Open Access

  • Laser pulses 100%
  • Surface structure 92%
  • incidence 62%
  • Lasers 58%
  • pulses 38%
  1 Citation (Scopus)

• Pulsed Laser-Based Hybrid Microscribing of Cu and Al in Salt Solution

  Shiby, S., Srinagalakshmi, N., Vasa, N. J., Matsuo, S. & Miryala, M., 2020 Sep 1, In: Journal of Micro and Nano-Manufacturing. 8, 3, 031002.

  Research output: Contribution to journal › Article › peer-review

  • Pulsed lasers 100%
  • Salts 67%
  • Etching 65%
  • Microchannels 59%
  • Aluminum 56%
  3 Citations (Scopus)
• 2017

  High-spatial-frequency periodic surface structures on steel substrate induced by subnanosecond laser pulses

  Hikage, H., Nosaka, N. & Matsuo, S., 2017 Nov, In: Applied Physics Express. 10, 11, 112701.

  Research output: Contribution to journal › Article › peer-review

  • Laser pulses 100%
  • Surface structure 92%
  • Lasers 58%
  • steels 56%
  • Substrates 54%
  9 Citations (Scopus)

• Laser Fabrication of Miniature Internal Thread in Glass Substrate

  Degawa, H., Urano, N. & Matsuo, S., 2017 Feb 8, In: Micromachines. 8, 2, 6 p., 48.

  Research output: Contribution to journal › Article › peer-review

  Open Access

  • Glass 100%
  • Lasers 95%
  • Fabrication 93%
  • Substrates 88%
  • Light sources 45%
  7 Citations (Scopus)

• Removal processing inside PDMS by short pulse laser

  Hayashi, K. & Matsuo, S., 2017, In: Journal of Laser Micro Nanoengineering. 12, 2, p. 141-145 5 p.

  Research output: Contribution to journal › Article › peer-review

  • Q switched lasers 100%
  • Photomasks 78%
  • Neodymium lasers 73%
  • Laser pulses 71%
  • Polydimethylsiloxane 68%

• Water-assisted laser drilling for miniature internal thread in glass and evaluation of its strength

  Murakami, R., Nakagawa, H. & Matsuo, S., 2017 Dec 1, In: Journal of Laser Micro Nanoengineering. 12, 3, p. 203-206 4 p.

  Research output: Contribution to journal › Article › peer-review

  • laser drilling 100%
  • threads 84%
  • Fracture toughness 62%
  • Drilling 60%
  • Glass 56%
  5 Citations (Scopus)
• 2016

  Subnanosecond-laser-induced periodic surface structures on prescratched silicon substrate

  Hongo, M. & Matsuo, S., 2016 Jun, In: Applied Physics Express. 9, 6, 062703.

  Research output: Contribution to journal › Article › peer-review

  • Surface structure 100%
  • Silicon 65%
  • Lasers 62%
  • Substrates 58%
  • silicon 44%
  4 Citations (Scopus)
• 2015

  Effect of solvent surface tension on optical limiting properties of graphene dispersions

  Sun, X., Yan, L., Chen, T., Yu, Y. & Matsuo, S., 2015 Mar 1, In: Laser Physics. 25, 3, 035901.

  Research output: Contribution to journal › Article › peer-review

  • Dispersions 100%
  • Graphene 89%
  • Surface tension 80%
  • interfacial tension 67%
  • graphene 62%
  5 Citations (Scopus)

• Spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond laser processing

  Matsuo, S. & Hashimoto, S., 2015 Jan 12, In: Optics Express. 23, 1, p. 165-171 7 p.

  Research output: Contribution to journal › Article › peer-review

  • scanning 100%
  • lasers 69%
  • irradiation 51%
  • pulses 39%
  • micrometers 36%
  7 Citations (Scopus)
• 2014

  High-frame-rate observation of single femtosecond laser pulse propagation in fused silica using an echelon and optical polarigraphy technique

  Wang, X., Yan, L., Si, J., Matsuo, S., Xu, H. & Hou, X., 2014 Dec 20, In: Applied Optics. 53, 36, p. 8395-8399 5 p.

  Research output: Contribution to journal › Article › peer-review

  • Ultrashort pulses 100%
  • Fused silica 86%
  • silicon dioxide 47%
  • Laser pulses 40%
  • propagation 36%
  32 Citations (Scopus)
• 2013

  Laser-scanning direction effect in femtosecond laser-assisted etching

  Matsuo, S., Umeda, Y., Tomita, T. & Hashimoto, S., 2013 Jan, In: Journal of Laser Micro Nanoengineering. 8, 1, p. 35-38 4 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • Etching 69%
  • Scanning 49%
  • Lasers 48%
  • etching 48%
  2 Citations (Scopus)
• 2012

  Application of optical Kerr gate with SrTiO₃ crystal in acquisition of gated spectra from a supercontinuum

  Yan, L. H., Jia, S., Si, J. H., Matsuo, S., Chen, F. & Hou, X., 2012 Jul, In: Chinese Physics Letters. 29, 7, 074207.

  Research output: Contribution to journal › Article › peer-review

  • acquisition 100%
  • crystals 54%
  • Kerr effects 40%
  • refractivity 25%
  • bandwidth 25%
  3 Citations (Scopus)

• Electrical conduction properties of SiC modified by femtosecond laser

  Ito, T., Deki, M., Tomita, T., Matsuo, S., Hashimoto, S., Kitada, T., Isu, T., Onoda, S. & Ohshima, T., 2012 Feb, In: Journal of Laser Micro Nanoengineering. 7, 1, p. 16-20 5 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • Silicon carbide 68%
  • silicon carbides 61%
  • Polarization 58%
  • Scanning 49%
  4 Citations (Scopus)

• Possibility of gravitational tempering in colloidal epitaxy to obtain a perfect crystal

  Mori, A., Suzuki, Y. & Matsuo, S. M., 2012, In: Chemistry Letters. 41, 10, p. 1069-1071 3 p.

  Research output: Contribution to journal › Article › peer-review

  • Tempering 100%
  • Epitaxial Growth 87%
  • Gravity 82%
  • Strength 30%
  • Monte Carlo Method 25%
  5 Citations (Scopus)

• Reduction of pulse-to-pulse fluctuation in laser pulse energy using the optical Kerr effect

  Matsuo, S., Yan, L., Si, J., Tomita, T. & Hashimoto, S., 2012 May 15, In: Optics Letters. 37, 10, p. 1646-1648 3 p.

  Research output: Contribution to journal › Article › peer-review

  • Kerr effects 100%
  • pulses 45%
  • lasers 40%
  • energy 27%
  • controllers 18%
  4 Citations (Scopus)

• Time-resolved single-shot imaging of femtosecond laser induced filaments using supercontinuum and optical polarigraphy

  Yan, L., Wang, X., Si, J., Matsuo, S., Chen, T., Tan, W., Chen, F. & Hou, X., 2012 Mar 12, In: Applied Physics Letters. 100, 11, 111107.

  Research output: Contribution to journal › Article › peer-review

  • shot 100%
  • filaments 90%
  • pulses 52%
  • propagation 46%
  • lasers 45%
  16 Citations (Scopus)
• 2011

  Enhancement of local electrical conductivities in SiC by femtosecond laser modification

  Deki, M., Ito, T., Yamamoto, M., Tomita, T., Matsuo, S., Hashimoto, S., Kitada, T., Isu, T., Onoda, S. & Ohshima, T., 2011 Mar 28, In: Applied Physics Letters. 98, 13, 133104.

  Research output: Contribution to journal › Article › peer-review

  • electrical resistivity 100%
  • augmentation 96%
  • fluence 88%
  • conductivity 69%
  • lasers 69%
  13 Citations (Scopus)

• Femtosecond laser-assisted etching of fluoride crystals

  Matsuo, S., Iwasa, K., Tomita, T., Hashimoto, S. & Okada, T., 2011 Dec, In: Journal of Laser Micro Nanoengineering. 6, 3, p. 245-248 4 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • Etching 69%
  • Crystals 63%
  • fluorides 62%
  • etching 48%
  1 Citation (Scopus)

• Matrix calculus for axially symmetric polarized beam

  Matsuo, S., 2011 Jun 20, In: Optics Express. 19, 13, p. 12815-12824 10 p.

  Research output: Contribution to journal › Article › peer-review

  • calculus 100%
  • matrices 47%
  • polarization 23%
  • polar coordinates 19%
  • coding 13%
  12 Citations (Scopus)

• Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface

  Tomita, T., Kumai, R., Nomura, H., Matsuo, S., Hashimoto, S., Morita, K. & Isu, T., 2011 Oct 1, In: Applied Physics A: Materials Science and Processing. 105, 1, p. 89-94 6 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • Nanostructures 78%
  • Laser beams 73%
  • Surface Roughness 64%
  • Electric Field 57%
  10 Citations (Scopus)
• 2010

  Microscopic analysis of carbon phases induced by femtosecond laser irradiation on single-crystal SiC

  Tomita, T., Okada, T., Kawahara, H., Kumai, R., Matsuo, S., Hashimoto, S., Kawamoto, M., Yamaguchi, M., Ueno, S., Shindou, E. & Yoshida, A., 2010 Jul 1, In: Applied Physics A: Materials Science and Processing. 100, 1, p. 113-117 5 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • Laser beam effects 95%
  • Single crystals 73%
  • Raman Intensity 53%
  • Carbon 48%
  16 Citations (Scopus)

• Micro three-dimensional removal processing inside sapphire substrate

  Tokumi, K., Matsuo, S., Kiyama, S., Tomita, T. & Hashimoto, S., 2010 Jun, In: Journal of Laser Micro Nanoengineering. 5, 2, p. 179-182 4 p.

  Research output: Contribution to journal › Article › peer-review

  • Sapphire 100%
  • Etching 80%
  • sapphire 63%
  • etching 56%
  • Substrates 52%

• Raman spectroscopic stress evaluation of femtosecond-laser-modified region inside 4H-SIC

  Yamamoto, M., Deki, M., Takahashi, T., Tomita, T., Okada, T., Matsuo, S., Hashimoto, S., Yamaguchi, M., Nakagawa, K., Uehara, N. & Kamano, M., 2010 Jan, In: Applied Physics Express. 3, 1, 016603.

  Research output: Contribution to journal › Article › peer-review

  • Phonons 100%
  • Femtosecond lasers 99%
  • structural influence coefficients 97%
  • Compressive stress 66%
  • tensile stress 65%
  11 Citations (Scopus)

• Raman spectroscopic study of femtosecond laser-induced phase transformation associated with ripple formation on single-crystal SiC

  Yamaguchi, M., Ueno, S., Kumai, R., Kinoshita, K., Murai, T., Tomita, T., Matsuo, S. & Hashimoto, S., 2010 Apr 1, In: Applied Physics A: Materials Science and Processing. 99, 1, p. 23-27 5 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • Single crystals 73%
  • Silicon Carbide 71%
  • Silicon carbide 68%
  • Phase transitions 66%
  49 Citations (Scopus)
• 2009

  Cross-sectional morphological profiles of ripples on Si, SiC, and HOPG

  Tomita, T., Kumai, R., Matsuo, S., Hashimoto, S. & Yamaguchi, M., 2009 Nov 1, In: Applied Physics A: Materials Science and Processing. 97, 2, p. 271-276 6 p.

  Research output: Contribution to journal › Article › peer-review

  • Silicon Carbide 100%
  • Silicon carbide 96%
  • Graphite 88%
  • Silicon 70%
  • Femtosecond lasers 46%
  20 Citations (Scopus)

• Disappearance of a stacking fault in hard-sphere crystals under gravity

  Mori, A., Suzuki, Y. & Matsuo, S., 2009, In: Progress of Theoretical Physics Supplement. 178, p. 33-40 8 p.

  Research output: Contribution to journal › Article › peer-review

  Open Access

  • crystal defects 100%
  • gravitation 75%
  • crystals 49%
  • boundary conditions 48%
  • gliding 44%
  7 Citations (Scopus)

• Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates

  Kiyama, S., Matsuo, S., Hashimoto, S. & Morihira, Y., 2009 Jul 9, In: Journal of Physical Chemistry C. 113, 27, p. 11560-11566 7 p.

  Research output: Contribution to journal › Article › peer-review

  • Vitreous Silica 100%
  • Fused silica 89%
  • Microfabrication 81%
  • Etching 69%
  • examination 54%
  178 Citations (Scopus)

• Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH

  Matsuo, S., Sumi, H., Kiyama, S., Tomita, T. & Hashimoto, S., 2009 Sep 30, In: Applied Surface Science. 255, 24, p. 9758-9760 3 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • borosilicate glass 73%
  • Etching 69%
  • aqueous solutions 59%
  • Glass 51%
  29 Citations (Scopus)

• Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation

  Okada, T., Tomita, T., Matsuo, S., Hashimoto, S., Ishida, Y., Kiyama, S. & Takahashi, T., 2009 Sep 28, In: Journal of Applied Physics. 106, 5, 054307.

  Research output: Contribution to journal › Article › peer-review

  • silicon carbides 100%
  • irradiation 66%
  • single crystals 64%
  • lasers 45%
  • cross sections 30%
  26 Citations (Scopus)

• Fourier-transform infrared spectroscopy of femtosecond laser-modified SiC

  Tomita, T., Iwami, M., Matsuo, S., Hashimoto, S., Saito, S. & Sakai, K., 2009, In: Journal of Laser Micro Nanoengineering. 4, 3, p. 182-185 4 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • Fourier transform infrared spectroscopy 79%
  • Silicon carbide 68%
  • silicon carbides 61%
  • infrared spectroscopy 57%

• Preparation of large-scale 2D zeolite crystal array structures to achieve optical functionality

  Hashimoto, S., Samata, K., Shoji, T., Taira, N., Tomita, T. & Matsuo, S., 2009 Jan 1, In: Microporous and Mesoporous Materials. 117, 1-2, p. 220-227 8 p.

  Research output: Contribution to journal › Article › peer-review

  • Zeolites 100%
  • zeolites 94%
  • Crystals 82%
  • Zeolite 63%
  • preparation 60%
  48 Citations (Scopus)
• 2008

  Cross-sectional TEM analysis of laser-induced ripple structures on the 4H-SiC single-crystal surface

  Okada, T., Kawahara, H., Ishida, Y., Kumai, R., Tomita, T., Matsuo, S., Hashimoto, S., Kawamoto, M., Makita, Y. & Yamaguchi, M., 2008 Aug, In: Applied Physics A: Materials Science and Processing. 92, 3, p. 665-668 4 p.

  Research output: Contribution to journal › Article › peer-review

  • Single crystal surfaces 100%
  • High resolution transmission electron microscopy 80%
  • Femtosecond lasers 76%
  • Single Crystal Surface 64%
  • Crystal structure 63%
  21 Citations (Scopus)

• Examination of silver nanoparticle fabrication by pulsed-laser ablation of flakes in primary alcohols

  Werner, D., Hashimoto, S., Tomita, T., Matsuo, S. & Makita, Y., 2008 Feb 7, In: Journal of Physical Chemistry C. 112, 5, p. 1321-1329 9 p.

  Research output: Contribution to journal › Article › peer-review

  • Laser ablation 100%
  • Silver nanoparticles 98%
  • Chain length 96%
  • Pulsed lasers 93%
  • Ablation 79%
  47 Citations (Scopus)

• In-situ spectroscopic measurements of laser ablation-induced splitting and agglomeration of metal nanoparticles in solution

  Werner, D., Hashimoto, S., Tomita, T., Matsuo, S. & Makita, Y., 2008 Oct 30, In: Journal of Physical Chemistry C. 112, 43, p. 16801-16808 8 p.

  Research output: Contribution to journal › Article › peer-review

  • Metal nanoparticles 100%
  • Laser ablation 87%
  • agglomeration 64%
  • Metal Nanoparticle 59%
  • Nanoparticles 58%
  30 Citations (Scopus)

• Laser microfabrication and rotation of ship-in-a-bottle optical rotators

  Matsuo, S., Kiyama, S., Shichijo, Y., Tomita, T., Hashimoto, S., Hosokawa, Y. & Masuhara, H., 2008, In: Applied Physics Letters. 93, 5, 051107.

  Research output: Contribution to journal › Article › peer-review

  • bottles 100%
  • ships 91%
  • lasers 34%
  • trapping 30%
  • etching 29%
  56 Citations (Scopus)

• Observation of laser-induced surface waves on flat silicon surface

  Tomita, T., Fukumori, Y., Kinoshita, K., Matsuo, S. & Hashimoto, S., 2008, In: Applied Physics Letters. 92, 1, 013104.

  Research output: Contribution to journal › Article › peer-review

  • surface waves 100%
  • silicon 55%
  • pulses 51%
  • lasers 45%
  • electric fields 40%
  47 Citations (Scopus)

• Three-dimensional micro- And nano-structuring of materials by tightly focused laser radiation

  Juodkazis, S., Mizeikis, V., Matsuo, S., Ueno, K. & Misawa, H., 2008, In: Bulletin of the Chemical Society of Japan. 81, 4, p. 411-448 38 p.

  Research output: Contribution to journal › Article › peer-review

  • Laser Radiation 100%
  • Liquid Crystal 66%
  • Optical Microscopy 63%
  • Glass 49%
  • Microstructure 48%
  84 Citations (Scopus)

• Three-dimensional residue-free volume removal inside sapphire by high-temperature etching after irradiation of femtosecond laser Pulses

  Matsuo, S., Tokumi, K., Tomita, T. & Hashimoto, S., 2008, In: Laser Chemistry. 2008, 892721.

  Research output: Contribution to journal › Article › peer-review

  • Aluminum Oxide 100%
  • Etching 70%
  • sapphire 66%
  • Lasers 63%
  • etching 59%
  11 Citations (Scopus)
• 2007

  Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array

  Matsuo, S., Miyamoto, T., Tomita, T. & Hashimoto, S., 2007 Dec 1, In: Applied Optics. 46, 34, p. 8264-8267 4 p.

  Research output: Contribution to journal › Article › peer-review

  • Photopolymers 100%
  • Photomasks 91%
  • photomasks 83%
  • Microfabrication 81%
  • photopolymers 81%
  18 Citations (Scopus)

• Effect of surface roughening on femtosecond laser-induced ripple structures

  Tomita, T., Kinoshita, K., Matsuo, S. & Hashimoto, S., 2007, In: Applied Physics Letters. 90, 15, 153115.

  Research output: Contribution to journal › Article › peer-review

  • ripples 100%
  • lasers 40%
  • surface roughness 26%
  • thresholds 18%
  • fluence 12%
  124 Citations (Scopus)

• Femtosecond laser-induced ripple structures in semiconductor materials

  Tomita, T., Kinoshita, K., Murai, T., Fukumori, Y., Matsuo, S. & Hashimoto, S., 2007 Jun 1, In: Journal of Laser Micro Nanoengineering. 2, 2, p. 141-145 5 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • ripples 69%
  • Silicon carbide 68%
  • Semiconductor materials 56%
  • Irradiation 32%
  1 Citation (Scopus)

• Laser fabrication of ship-in-a-bottle microstructures in sapphire

  Matsuo, S., Shichijo, Y., Tomita, T. & Hashimoto, S., 2007 Jun 1, In: Journal of Laser Micro Nanoengineering. 2, 2, p. 114-116 3 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • Sapphire 85%
  • bottles 81%
  • Bottles 77%
  • ships 74%
  18 Citations (Scopus)

• Structural characterization of shock-affected sapphire

  Mazilu, M., Juodkazis, S., Ebisui, T., Matsuo, S. & Misawa, H., 2007 Feb, In: Applied Physics A: Materials Science and Processing. 86, 2, p. 197-200 4 p.

  Research output: Contribution to journal › Article › peer-review

  • Shock Wave 100%
  • Sapphire 95%
  • Shock waves 80%
  • High resolution transmission electron microscopy 58%
  • Wave propagation 37%
  27 Citations (Scopus)
• 2006

  Control over the crystalline state of sapphire

  Juodkazis, S., Nishimura, K., Misawa, H., Ebisui, T., Waki, R., Matsuo, S. & Okada, T., 2006 Jun 6, In: Advanced Materials. 18, 11, p. 1361-1364 4 p.

  Research output: Contribution to journal › Article › peer-review

  • Sapphire 100%
  • Crystalline materials 78%
  • Ultrashort pulses 24%
  • Chemical reactivity 23%
  • Femtosecond lasers 23%
  136 Citations (Scopus)

• Distinct fine and coarse ripples on 4H-SiC single crystal induced by femtosecond laser irradiation

  Tomita, T., Kinoshita, K., Matsuo, S. & Hashimoto, S., 2006, In: Japanese Journal of Applied Physics, Part 2: Letters. 45, 12-16, p. L444-L446

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • Laser beam effects 95%
  • Periodic structures 86%
  • Single crystals 73%
  • ripples 69%
  41 Citations (Scopus)

• Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography

  Kondo, T., Juodkazis, S., Mizeikis, V., Matsuo, S. & Misawa, H., 2006 Oct 24, In: New Journal of Physics. 8, 250.

  Research output: Contribution to journal › Article › peer-review

  • photoresists 100%
  • lithography 79%
  • fabrication 57%
  • microstructure 55%
  • micrometers 43%
  60 Citations (Scopus)

• Femtosecond laser assisted etching of quartz: Microstructuring from inside

  Matsuo, S., Tabuchi, Y., Okada, T., Juodkazis, S. & Misawa, H., 2006 Jul 1, In: Applied Physics A: Materials Science and Processing. 84, 1-2, p. 99-102 4 p.

  Research output: Contribution to journal › Article › peer-review

  • Femtosecond lasers 100%
  • Quartz 71%
  • Etching 69%
  • Wet etching 59%
  • Microchannels 46%
  38 Citations (Scopus)

• Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8

  Kondo, T., Juodkazis, S., Mizeikis, V., Misawa, H. & Matsuo, S., 2006, In: Optics Express. 14, 17, p. 7943-7953 11 p.

  Research output: Contribution to journal › Article › peer-review

  • fluidics 100%
  • beam splitters 94%
  • photoresists 90%
  • collimators 89%
  • templates 79%
  112 Citations (Scopus)