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Fingerprint Dive into the research topics where Tetsuya Homma is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Engineering & Materials Science

Photoresists
Chemical vapor deposition
Silicon oxides
Polyimides
Liquids
Plasmas
Polysilicon
Temperature
Amplification
Glass
Dielectric films
Interferometry
Etching
Electric wiring
Reaction products
Oxide films
Gases
Wavelength
Fabrication
Gas mixtures
Optical properties
Laser pulses
Optical waveguides
Resins
Hydrogen
Phase shifters
Rotating disks
Phase noise
Thin films
Ozone
Integrated circuits
Phase shift
Paint
Deposition rates
Vapors
Silanes
Carbon
Annealing
Seed
Compressors
Fibers
Oxides
Electric fields
Ammonia
Fluorine
Phase measurement
Metallizing
Permittivity
Pulse amplifiers
Logic devices

Physics & Astronomy

Chemistry and Materials

silicon oxides
glass
carbon tetrafluoride
siloxanes
gases
gas mixtures
polyimides
ozone
ammonia
silicon
fluorine
oligomers
oxides
amorphous silicon

General

photoresists
liquid phases
envelopes
vapor deposition
silicon films
oxide films
reaction products
thin films
wiring
pulses
wafers
shot
switches
interference
spacers
flat panel displays
selectivity

Engineering

interlayers
etching
fabrication
interferometry
shapers
xenon lamps
field effect transistors
annealing
flash lamps
CMOS

Physics

optical waveguides
room temperature
wavelengths
optical properties
refractivity
high speed
temperature
flow characteristics

Aerospace Sciences

rotating disks

Chemical Compounds

Silicon oxides
Photoresists
Siloxanes
Gases
Chemical vapor deposition
Liquids
Glass
Dielectric films
Fabrication
Ozone
Temperature
Etching
Oxides
Metals
Oxide films
Thin films
Integrated circuits
Polyimides
Paint
Electric wiring
Hydrogen
Optical properties
Resins
Silicates
Polysilicon
Aluminum
Reaction products
Annealing
Permittivity
Vapors
Perylene
Pulse amplifiers
Enamels
Semiconductor materials
Plasmas
Silicon Dioxide
Silanes
Oligomers
Optical waveguides
Wave filters
Hydrofluoric Acid
Fluorine
Xenon
Water
Wavelength
Plasma etching
Composite Resins
Amorphous silicon
Steam
Electroluminescence