If you made any changes in Pure these will be visible here soon.

Research Output 1983 2018

  • 1562 Citations
  • 20 h-Index
  • 117 Article
  • 17 Conference contribution
Filter
Conference contribution
2009

Normal-dispersion passively mode-locked ytterbium-doped fiber laser with a fundamental repetition rate higher than 400 MHz

Yoshitomi, D., Kawasaki, T., Aoki, T., Kobayashi, Y., Nakamura, N., Homma, T., Kawata, H. & Torizuka, K., 2009, Optics InfoBase Conference Papers.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ytterbium
ytterbium
Fiber lasers
Laser modes
fiber lasers
2008

An algorithm to visualize tool difference transitions in semiconductor fabrications

Kubo, T., Minami, M. & Homma, T., 2008, IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings. p. 215-218 4 p. 5714922

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductor materials
Fabrication
Regression analysis
Engineers
Processing
2005

Chirped-pulse amplification system providing electric-field-controlled optical pulses

Kakehata, M., Takada, H., Kobayashi, Y., Torizuka, K., Nishijima, K., Takamiya, H., Homma, T. & Takahashi, H., 2005, Optics InfoBase Conference Papers. Optical Society of America

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Amplification
Laser pulses
Electric fields
envelopes
electric fields

Effect of beam pointing shift on the carrier-envelope phase measurement using self-referencing spectral interferometry method

Kakehata, M., Takada, H., Kobayashi, Y., Torizuka, K., Takamiya, H., Nishijima, K., Homma, T. & Takahashi, H., 2005, Optics InfoBase Conference Papers. Optical Society of America

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Phase measurement
spectral methods
Interferometry
Sapphire
hollow
2004
2 Citations (Scopus)

Carrier-envelope phase stabilized chirped-pulse amplification system using a grating-based pulse stretcher and compressor

Kakehata, M., Takada, H., Kobayashi, Y., Torizuka, K., Takamiya, H., Nishijima, K., Homma, T., Takahashi, H., Okubo, K., Nakamura, S. & Koyamada, Y., 2004, OSA Trends in Optics and Photonics Series. Optical Society of American (OSA), Vol. 94. p. 18-22 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Amplification
Compressors
Pulse generators
Interferometry
Electronic equipment
8 Citations (Scopus)

Properties of amplitude-to-phase noise conversion in self-referencing method using microstructure fibers for carrier-envelope phase control

Okubo, K., Nakamura, S., Koyamada, Y., Kakehata, M., Kobayashi, Y., Takada, H., Torizuka, K., Takamiya, H., Nishijima, K., Homma, T. & Takahashi, H., 2004, OSA Trends in Optics and Photonics Series. Optical Society of American (OSA), Vol. 94. p. 170-175 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Phase control
Phase noise
Microstructure
Fibers
Phase measurement

Use of 4f pulse shaper as an active carrier-envelope phase shifter

Kakehata, M., Takada, H., Kobayashi, Y., Torizuka, K., Nishijima, K., Takamiya, H., Homma, T. & Takahashi, H., 2004, OSA Trends in Optics and Photonics Series. Optical Society of American (OSA), Vol. 96 A. p. 791-792 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Phase shifters
Interferometry
Phase shift
Spatial light modulators
2001

Single-shot measurement of the carrier envelope phase by observing the spectral interference

Kakehata, M., Torizuka, K., Fujihira, Y., Homma, T. & Takahashi, H., 2001, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 2.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

shot
envelopes
interference
continuums
harmonics

Single-shot measurement of the carrier-envelope phase through observation of the self-referencing spectral interferometry

Kakehata, M., Takada, H., Kobayashi, Y., Torizuka, K., Fujihira, Y., Homma, T. & Takahashi, H., 2001, Conference on Lasers and Electro-Optics Europe - Technical Digest.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Group delay
Interferometry
Laser pulses
Amplification
Fourier transforms
2000
3 Citations (Scopus)

Fabrication and properties of Bi2SiO5 thin films for MFIS structures

Yamaguchi, M., Hiraki, K., Homma, T., Nagatomo, T. & Masuda, Y., 2000, IEEE International Symposium on Applications of Ferroelectrics. Streiffer, S. K., Gibbons, B. J. & Tsurumi, T. (eds.). Vol. 2. p. 629-632 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ferroelectric materials
Metals
Semiconductor materials
Fabrication
Thin films
1995
7 Citations (Scopus)

Fluorinated SiO 2 films for interlayer dielectrics in quarter-micron ULSI multilevel interconnections

Homma, T., 1995, Materials Research Society Symposium - Proceedings. Sundahl, C. R., Tu, K-N., Jackson, A. K. & Borgesen, P. (eds.). Materials Research Society, Vol. 381. p. 239-248 10 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Temperature
Chemical vapor deposition
Permittivity
Gases
Vapors
1992
2 Citations (Scopus)

A fully planarized multilevel interconnection technology using selective TEOS-Ozone APCVD

Suzuki, M., Homma, T., Koga, H., Tanigawa, T. & Murao, Y., 1992 Jan 1, 1992 International Technical Digest on Electron Devices Meeting, IEDM 1992. Institute of Electrical and Electronics Engineers Inc., p. 293-296 4 p. 307363. (Technical Digest - International Electron Devices Meeting, IEDM; vol. 1992-December).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ozone
ozone
wiring
oligomers
Electric wiring
1990
12 Citations (Scopus)

A new interlayer formation technology for completely planarized multilevel interconnection by using LPD

Homma, T., Katoh, T., Yamada, Y., Shimizu, J. & Murao, Y., 1990, Digest of Technical Papers - Symposium on VLSI Technology. Publ by IEEE, p. 3-4 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Liquids
Logic devices
Electric wiring
Thermal stress
Chemical vapor deposition
3 Citations (Scopus)

Low temperature interlayer formation technology using a new siloxane polymer film

Suzuki, M., Homma, T. & Numasawa, Y., 1990, Proceedings - International IEEE VLSI Multilevel Interconnection Conference. Piscataway, NJ, United States: Publ by IEEE, p. 173-179 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polymer films
Silanes
Temperature
Furnaces
Heat treatment
1989
4 Citations (Scopus)

Multilevel gold metallization by use of selective W-CVD and polyimide siloxane film

Mikagi, K., Homma, T., Katoh, T., Tsunenari, K. & Murao, Y., 1989, Sixth Int VLSI Multilevel Interconnect Conf. Anon (ed.). Piscataway, NJ, United States: Publ by IEEE, p. 33-39 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Metallizing
Polyimides
Chemical vapor deposition
Gold
Electric wiring
1988
6 Citations (Scopus)

New polyimide siloxane film for interlayer dielectrics in sub-micron multilevel interconnection.

Homma, T., Eguchi, K., Numasawa, Y., Kikkawa, T., Hokari, Y. & Hamano, K., 1988, 1988 Proc Fifth Int IEEE VLSI Multilevel Interconnect Conf. Piscataway, NJ, United States: Publ by IEEE, p. 279-285 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polyimides
Plasma CVD
Chemical bonds
Heat resistance
Leakage currents
1984
10 Citations (Scopus)

NEW TRENCH ISOLATION TECHNOLOGY AS A REPLACEMENT OF LOCOS.

Mikoshiba, H., Homma, T. & Hamano, K., 1984, Technical Digest - International Electron Devices Meeting. IEEE, p. 578-581 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polysilicon
Dynamic random access storage
Birds
Photoresists
Oxidation