Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 1 Similar Profiles
transducers Physics & Astronomy
acoustic levitation Physics & Astronomy
Transducers Engineering & Materials Science
vibration Physics & Astronomy
Acoustic fields Engineering & Materials Science
Ultrasonics Engineering & Materials Science
ultrasonics Physics & Astronomy
near fields Physics & Astronomy

Research Output 1991 2012

  • 483 Citations
  • 11 h-Index
  • 53 Article
  • 8 Conference contribution
  • 1 Chapter

Micro fabrication of poly L lacid and its application

Koike, Y., Takeuchi, H., Hagiwara, H., Ogura, T., Aoki, D., Kumagai, K., Ishikawa, T. & Nishikawa, H. 2012 1st IEEE Global Conference on Consumer Electronics 2012, GCCE 2012. p. 60-61 2 p. 6379929

Research output: ResearchConference contribution

Microfabrication
Lactic acid
Proton beams
Actuators
Polymers
2 Citations

Application of novel ultrasonic cleaning equipment that uses the waveguide mode for the single-wafer cleaning process

Suzuki, K., Imazeki, Y., Han, K., Okano, S., Soejima, J. & Koike, Y. 2011 May In : Japanese Journal of Applied Physics. 50, 5 PART 2, 05EC10

Research output: Research - peer-reviewArticle

ultrasonic cleaning
cleaning
wafers
waveguides
Ultrasonic cleaning

Application of novel ultrasonic cleaning equipment using waveguide mode for single-wafer cleaning process

Suzuki, K., Imazeki, Y., Han, K., Okano, S., Soejima, J. & Koike, Y. 2010 Advanced Metallization Conference (AMC). p. 298-299 2 p.

Research output: ResearchConference contribution

Ultrasonic cleaning
Cavitation
Cleaning
Waveguides
Ultrasonic equipment
5 Citations

Application of novel ultrasonic cleaning equipment using waveguide mode for post-chemical-mechanical-planarization cleaning

Suzuki, K., Han, K., Okano, S., Soejima, J. & Koike, Y. 2009 Jul In : Japanese Journal of Applied Physics. 48, 7 PART 2, 07GM04

Research output: Research - peer-reviewArticle

Ultrasonic cleaning
Chemical mechanical polishing
Cleaning
Waveguides
ultrasonic cleaning

Novel ultrasonic cleaning equipment using waveguide mode

Suzuki, K., Han, K., Okano, S., Soejima, J. & Koike, Y. 2009 Jul In : Japanese Journal of Applied Physics. 48, 7 PART 2, 07GM05

Research output: Research - peer-reviewArticle

ultrasonic cleaning
waveguides
Ultrasonic cleaning
Waveguides
ultrasonic radiation