Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

acoustic levitation Physics & Astronomy
Acoustic fields Engineering & Materials Science
transducers Physics & Astronomy
Transducers Engineering & Materials Science
Ultrasonic cleaning Engineering & Materials Science
Ultrasonics Engineering & Materials Science
ultrasonics Physics & Astronomy
near fields Physics & Astronomy

Research Output 1991 2012

  • 496 Citations
  • 11 h-Index
  • 53 Article
  • 8 Conference contribution
  • 1 Chapter

Micro fabrication of poly L lacid and its application

Koike, Y., Takeuchi, H., Hagiwara, H., Ogura, T., Aoki, D., Kumagai, K., Ishikawa, T. & Nishikawa, H. 2012 1st IEEE Global Conference on Consumer Electronics 2012, GCCE 2012. p. 60-61 2 p. 6379929

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Microfabrication
Lactic acid
Proton beams
Actuators
Polymers
3 Citations

Application of novel ultrasonic cleaning equipment that uses the waveguide mode for the single-wafer cleaning process

Suzuki, K., Imazeki, Y., Han, K., Okano, S., Soejima, J. & Koike, Y. 2011 May In : Japanese Journal of Applied Physics. 50, 5 PART 2, 05EC10

Research output: Contribution to journalArticle

ultrasonic cleaning
Ultrasonic cleaning
cleaning
Cleaning
Waveguides

Application of novel ultrasonic cleaning equipment using waveguide mode for single-wafer cleaning process

Suzuki, K., Imazeki, Y., Han, K., Okano, S., Soejima, J. & Koike, Y. 2010 Advanced Metallization Conference (AMC). p. 298-299 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ultrasonic cleaning
Ultrasonic equipment
Cavitation
Cleaning
Waveguides
5 Citations

Application of novel ultrasonic cleaning equipment using waveguide mode for post-chemical-mechanical-planarization cleaning

Suzuki, K., Han, K., Okano, S., Soejima, J. & Koike, Y. 2009 Jul In : Japanese Journal of Applied Physics. 48, 7 PART 2, 07GM04

Research output: Contribution to journalArticle

ultrasonic cleaning
Ultrasonic cleaning
Chemical mechanical polishing
cleaning
Cleaning

Novel ultrasonic cleaning equipment using waveguide mode

Suzuki, K., Han, K., Okano, S., Soejima, J. & Koike, Y. 2009 Jul In : Japanese Journal of Applied Physics. 48, 7 PART 2, 07GM05

Research output: Contribution to journalArticle

ultrasonic cleaning
Ultrasonic cleaning
Waveguides
Ultrasonic waves
ultrasonic radiation