ニオブ酸リチウム基板を用いた表面弾性波応用マイクロ流体システム

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)16
JournalProceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
Publication statusPublished - 2007 Apr 1

Cite this

@article{f1c8437cd29c49f0acab6c566992f182,
title = "ニオブ酸リチウム基板を用いた表面弾性波応用マイクロ流体システム",
author = "Sumito Nagasawa",
year = "2007",
month = "4",
day = "1",
language = "English",
pages = "16",
journal = "Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)",

}

TY - JOUR

T1 - ニオブ酸リチウム基板を用いた表面弾性波応用マイクロ流体システム

AU - Nagasawa, Sumito

PY - 2007/4/1

Y1 - 2007/4/1

M3 - Article

SP - 16

JO - Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)

JF - Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)

ER -