ニオブ酸リチウム基板を用いた表面弾性波応用マイクロ流体システム

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)16
JournalProceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
Publication statusPublished - 2007 Apr 1

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