微小領域温度計測用非接触型SThMプローブ

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)17
JournalProceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
Publication statusPublished - 2007 Apr 1

Cite this

@article{7326ee68e2f647728ce787fbb75ccb6c,
title = "微小領域温度計測用非接触型SThMプローブ",
author = "Sumito Nagasawa",
year = "2007",
month = "4",
day = "1",
language = "English",
pages = "17",
journal = "Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)",

}

TY - JOUR

T1 - 微小領域温度計測用非接触型SThMプローブ

AU - Nagasawa, Sumito

PY - 2007/4/1

Y1 - 2007/4/1

M3 - Article

SP - 17

JO - Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)

JF - Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)

ER -