UHV-C-AFM(Ultra High Vacuum-Conductive-Atomic Force Microscopy)によるMOSFET用ゲート絶縁膜のリーク電流の局所観察

K. Kyuno, K. Kita, A. Toriumi

Research output: Contribution to journalArticle

Original languageEnglish
JournalApplied Physics Letters
Volume86
Publication statusPublished - 2005 Apr 1

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