1/4 miniaturized passive elements for GaAs MMICs

Makoto Hirano, Yuhki Imai, Kazuyoshi Asai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 3 Citations

Abstract

Novel miniature structures for passive elements--inductors and capacitors--are proposed to reduce the area they consume in GaAs MMICs. The miniaturized inductors are fabricated out of thick metal micro-wire, 10 μm thick, 6 μm wide, and with 2 μm spacing. The miniaturized capacitors are constructed as a corrugated structure with an insulator layer sandwiched between electrodes on a S.I. GaAs substrate with 3-μm-deep taper holes, in a checkerboard pattern. Both elements are fabricated employing very simple technology as a result of their monolayer structures. Adopting the proposed structures, the elements have been shrunk to 1/4 the size of conventional elements.

LanguageEnglish
Title of host publicationTechnical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)
Place of PublicationPiscataway, NJ, United States
PublisherPubl by IEEE
Pages37-40
Number of pages4
ISBN (Print)078030196X
StatePublished - 1992 Jan
Event13th Annual GaAs IC Symposium Technical Digest - Monterey, CA, USA
Duration: 1991 Oct 201991 Oct 23

Other

Other13th Annual GaAs IC Symposium Technical Digest
CityMonterey, CA, USA
Period91/10/2091/10/23

Fingerprint

Monolithic microwave integrated circuits
Capacitors
Monolayers
Wire
Electrodes
Substrates
Metals

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Hirano, M., Imai, Y., & Asai, K. (1992). 1/4 miniaturized passive elements for GaAs MMICs. In Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit) (pp. 37-40). Piscataway, NJ, United States: Publ by IEEE.

1/4 miniaturized passive elements for GaAs MMICs. / Hirano, Makoto; Imai, Yuhki; Asai, Kazuyoshi.

Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit). Piscataway, NJ, United States : Publ by IEEE, 1992. p. 37-40.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hirano, M, Imai, Y & Asai, K 1992, 1/4 miniaturized passive elements for GaAs MMICs. in Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit). Publ by IEEE, Piscataway, NJ, United States, pp. 37-40, 13th Annual GaAs IC Symposium Technical Digest, Monterey, CA, USA, 91/10/20.
Hirano M, Imai Y, Asai K. 1/4 miniaturized passive elements for GaAs MMICs. In Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit). Piscataway, NJ, United States: Publ by IEEE. 1992. p. 37-40.
Hirano, Makoto ; Imai, Yuhki ; Asai, Kazuyoshi. / 1/4 miniaturized passive elements for GaAs MMICs. Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit). Piscataway, NJ, United States : Publ by IEEE, 1992. pp. 37-40
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