A Development of Micro-Machined Micro Ion Source for Flexible and Concurrent MEMS Process

Tomoyuki Ueda, Shinya Tamonoki, Tatsuya Suzuki, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)41
JournalProceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)
Publication statusPublished - 2010 Jun 29

Cite this

A Development of Micro-Machined Micro Ion Source for Flexible and Concurrent MEMS Process. / Ueda, Tomoyuki; Tamonoki, Shinya; Suzuki, Tatsuya; Nagasawa, Sumito; Kuwano, Hiroki.

In: Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010), 29.06.2010, p. 41.

Research output: Contribution to journalArticle

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