A Development of Micro-Machined Micro Ion Source for Flexible and Concurrent MEMS Process

Tomoyuki Ueda, Shinya Tamonoki, Tatsuya Suzuki, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)41
JournalProceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)
Publication statusPublished - 2010 Jun 29

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