TY - JOUR
T1 - A flexible micromachined planar spiral inductor for use as an artificial tactile mechanoreceptor
AU - Futai, Nobuyuki
AU - Futai, Nobuyuki
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
N1 - Funding Information:
This research has been supported by grants of Grant-in-Aid for Scientific Research of the Ministry of Education, Science and Culture of Japan, and “Research for the Future” Program of the Japan Society for the Promotion of Science (JSPS-RFTF96P00801). All the photomasks used in this research were fabricated using the EB lithography apparatus of the VLSI Design and Education Center (VDEC), the University of Tokyo. All the electroplating processes are performed using the precision electroplating system manufactured by Yamamoto-MS Co. Ltd, Tokyo, Japan.
PY - 2004/3/15
Y1 - 2004/3/15
N2 - A micromachined planar spiral inductor was created for use as a passive mechanoreceptor element in a tactile sensor. Simulations and experiments were conducted to examine the change in inductance and the deformation in elements implanted in a silicone rubber medium. The results of both showed that the implanted reception inductors had a reception area specific to their direction. The experiments showed that when the inductors were embedded at a depth of 1 mm in a silicone rubber medium with a Young's modulus of 0.98 MPa, the practical minimal spacing between them was 2 mm, and the practical minimal displacement they could detect was 100 μm. Using a spectrum ranging from 0 to 130 MHz, up to eleven implanted inductors could be measured simultaneously. The fabricated reception inductors had high robustness, high sensitivity, and high repeatability. When several were serially connected using two electrical lines, one single frequency spectrum of the circuit could provide information from all of them.
AB - A micromachined planar spiral inductor was created for use as a passive mechanoreceptor element in a tactile sensor. Simulations and experiments were conducted to examine the change in inductance and the deformation in elements implanted in a silicone rubber medium. The results of both showed that the implanted reception inductors had a reception area specific to their direction. The experiments showed that when the inductors were embedded at a depth of 1 mm in a silicone rubber medium with a Young's modulus of 0.98 MPa, the practical minimal spacing between them was 2 mm, and the practical minimal displacement they could detect was 100 μm. Using a spectrum ranging from 0 to 130 MHz, up to eleven implanted inductors could be measured simultaneously. The fabricated reception inductors had high robustness, high sensitivity, and high repeatability. When several were serially connected using two electrical lines, one single frequency spectrum of the circuit could provide information from all of them.
KW - Artificial mechanoreceptor
KW - Multipoint acquisition
KW - Planar spiral inductor
KW - Tactile sensor
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U2 - 10.1016/j.sna.2003.08.017
DO - 10.1016/j.sna.2003.08.017
M3 - Article
AN - SCOPUS:1242321059
VL - 111
SP - 293
EP - 303
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
SN - 0924-4247
IS - 2-3
ER -