A Fully Planarized Multilevel Interconnection Technology Using Selective TEOS-Ozone APCVD

M.Suzuki M.Suzuki, T.Homma T.Homma, Y.Murao Y.Murao, Tetsuya Homma

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	293-296
Journal	Proceedings of IEEE International Electron Devices Meeting
Publication status	Published - 1992 Dec 13

Cite this

@article{405d0c4905ce45f5bff214f90f0981d9,

title = "A Fully Planarized Multilevel Interconnection Technology Using Selective TEOS-Ozone APCVD",

author = "M.Suzuki M.Suzuki and T.Homma T.Homma and Y.Murao Y.Murao and Tetsuya Homma",

year = "1992",

month = dec,

day = "13",

language = "English",

pages = "293--296",

journal = "Proceedings of IEEE International Electron Devices Meeting",

}

TY - JOUR

T1 - A Fully Planarized Multilevel Interconnection Technology Using Selective TEOS-Ozone APCVD

AU - M.Suzuki, M.Suzuki

AU - T.Homma, T.Homma

AU - Y.Murao, Y.Murao

AU - Homma, Tetsuya

PY - 1992/12/13

Y1 - 1992/12/13

M3 - Article

SP - 293

EP - 296

JO - Proceedings of IEEE International Electron Devices Meeting

JF - Proceedings of IEEE International Electron Devices Meeting

ER -