A Fully Planarized Multilevel Interconnection Technology Using Selective TEOS-Ozone APCVD

M.Suzuki M.Suzuki, T.Homma T.Homma, Y.Murao Y.Murao, Tetsuya Homma

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)293-296
JournalProceedings of IEEE International Electron Devices Meeting
Publication statusPublished - 1992 Dec 13

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