A half-micron pitch Cu interconnection technology

K.Ueno K.Ueno, K.Ohto K.Ohto, K.Tsunenari K.Tsunenari, Kazuyoshi Ueno

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)27-28
Journal1995 Symposium on VLSI Technology Digest of Technical Papers
Publication statusPublished - 1996 Jun 1

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