A high reliability copper duel-damascene interconnection with direct-contact via structure

K.Ueno K.Ueno, M.Suzuki M.Suzuki, A.Matsumoto A.Matsumoto, K.Motoyama K.Motoyama, N.Ito N.Ito, K.Arita K.Arita, Y.Tsuchiya Y.Tsuchiya, T.Wake T.Wake, A.Kubo A.Kubo, K.Sugai K.Sugai, N.Oda N.Oda, H.Miyamoto H.Miyamoto, S.Saito S.Saito, Kazuyoshi Ueno

Research output: Contribution to journalArticle

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)265-268
Journal2000 IEDM Technical Digests
Publication statusPublished - 2000 Dec 1

Cite this

K.Ueno, K. U., M.Suzuki, M. S., A.Matsumoto, A. M., K.Motoyama, K. M., N.Ito, N. I., K.Arita, K. A., ... Ueno, K. (2000). A high reliability copper duel-damascene interconnection with direct-contact via structure. 2000 IEDM Technical Digests, 265-268.

A high reliability copper duel-damascene interconnection with direct-contact via structure. / K.Ueno, K.Ueno; M.Suzuki, M.Suzuki; A.Matsumoto, A.Matsumoto; K.Motoyama, K.Motoyama; N.Ito, N.Ito; K.Arita, K.Arita; Y.Tsuchiya, Y.Tsuchiya; T.Wake, T.Wake; A.Kubo, A.Kubo; K.Sugai, K.Sugai; N.Oda, N.Oda; H.Miyamoto, H.Miyamoto; S.Saito, S.Saito; Ueno, Kazuyoshi.

In: 2000 IEDM Technical Digests, 01.12.2000, p. 265-268.

Research output: Contribution to journalArticle

K.Ueno, KU, M.Suzuki, MS, A.Matsumoto, AM, K.Motoyama, KM, N.Ito, NI, K.Arita, KA, Y.Tsuchiya, YT, T.Wake, TW, A.Kubo, AK, K.Sugai, KS, N.Oda, NO, H.Miyamoto, HM, S.Saito, SS & Ueno, K 2000, 'A high reliability copper duel-damascene interconnection with direct-contact via structure', 2000 IEDM Technical Digests, pp. 265-268.
K.Ueno KU, M.Suzuki MS, A.Matsumoto AM, K.Motoyama KM, N.Ito NI, K.Arita KA et al. A high reliability copper duel-damascene interconnection with direct-contact via structure. 2000 IEDM Technical Digests. 2000 Dec 1;265-268.
K.Ueno, K.Ueno ; M.Suzuki, M.Suzuki ; A.Matsumoto, A.Matsumoto ; K.Motoyama, K.Motoyama ; N.Ito, N.Ito ; K.Arita, K.Arita ; Y.Tsuchiya, Y.Tsuchiya ; T.Wake, T.Wake ; A.Kubo, A.Kubo ; K.Sugai, K.Sugai ; N.Oda, N.Oda ; H.Miyamoto, H.Miyamoto ; S.Saito, S.Saito ; Ueno, Kazuyoshi. / A high reliability copper duel-damascene interconnection with direct-contact via structure. In: 2000 IEDM Technical Digests. 2000 ; pp. 265-268.
@article{b0e7c0482d4d45d6af102caf91dd484f,
title = "A high reliability copper duel-damascene interconnection with direct-contact via structure",
author = "K.Ueno K.Ueno and M.Suzuki M.Suzuki and A.Matsumoto A.Matsumoto and K.Motoyama K.Motoyama and N.Ito N.Ito and K.Arita K.Arita and Y.Tsuchiya Y.Tsuchiya and T.Wake T.Wake and A.Kubo A.Kubo and K.Sugai K.Sugai and N.Oda N.Oda and H.Miyamoto H.Miyamoto and S.Saito S.Saito and Kazuyoshi Ueno",
year = "2000",
month = "12",
day = "1",
language = "English",
pages = "265--268",
journal = "2000 IEDM Technical Digests",

}

TY - JOUR

T1 - A high reliability copper duel-damascene interconnection with direct-contact via structure

AU - K.Ueno, K.Ueno

AU - M.Suzuki, M.Suzuki

AU - A.Matsumoto, A.Matsumoto

AU - K.Motoyama, K.Motoyama

AU - N.Ito, N.Ito

AU - K.Arita, K.Arita

AU - Y.Tsuchiya, Y.Tsuchiya

AU - T.Wake, T.Wake

AU - A.Kubo, A.Kubo

AU - K.Sugai, K.Sugai

AU - N.Oda, N.Oda

AU - H.Miyamoto, H.Miyamoto

AU - S.Saito, S.Saito

AU - Ueno, Kazuyoshi

PY - 2000/12/1

Y1 - 2000/12/1

M3 - Article

SP - 265

EP - 268

JO - 2000 IEDM Technical Digests

JF - 2000 IEDM Technical Digests

ER -