A high reliability copper duel-damascene interconnection with direct-contact via structure

K.Ueno K.Ueno, M.Suzuki M.Suzuki, A.Matsumoto A.Matsumoto, K.Motoyama K.Motoyama, N.Ito N.Ito, K.Arita K.Arita, Y.Tsuchiya Y.Tsuchiya, T.Wake T.Wake, A.Kubo A.Kubo, K.Sugai K.Sugai, N.Oda N.Oda, H.Miyamoto H.Miyamoto, S.Saito S.Saito, Kazuyoshi Ueno

Research output: Contribution to journalArticle

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)265-268
Journal2000 IEDM Technical Digests
Publication statusPublished - 2000 Dec 1

Cite this

K.Ueno, K. U., M.Suzuki, M. S., A.Matsumoto, A. M., K.Motoyama, K. M., N.Ito, N. I., K.Arita, K. A., ... Ueno, K. (2000). A high reliability copper duel-damascene interconnection with direct-contact via structure. 2000 IEDM Technical Digests, 265-268.