Original language | English |
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Pages (from-to) | 265-268 |
Journal | 2000 IEDM Technical Digests |
Publication status | Published - 2000 Dec 1 |
A high reliability copper duel-damascene interconnection with direct-contact via structure
K.Ueno K.Ueno, M.Suzuki M.Suzuki, A.Matsumoto A.Matsumoto, K.Motoyama K.Motoyama, N.Ito N.Ito, K.Arita K.Arita, Y.Tsuchiya Y.Tsuchiya, T.Wake T.Wake, A.Kubo A.Kubo, K.Sugai K.Sugai, N.Oda N.Oda, H.Miyamoto H.Miyamoto, S.Saito S.Saito, Kazuyoshi Ueno
Research output: Contribution to journal › Article › peer-review
18
Citations
(Scopus)