A high reliability Cu dual-damascene interconnection direct- contact via structure(Invited)

K.Ueno K.Ueno; M.Suzuki M.Suzuki; A.Mtsumoto A.Mtsumoto; K.Motoyama K.Motoyama; N.Oda N.Oda; H.Miyamoto H.Miyamoto; S.Ssaito S.Ssaito; Kazuyoshi Ueno

A high reliability Cu dual-damascene interconnection direct- contact via structure(Invited)

K.Ueno K.Ueno, M.Suzuki M.Suzuki, A.Mtsumoto A.Mtsumoto, K.Motoyama K.Motoyama, N.Oda N.Oda, H.Miyamoto H.Miyamoto, S.Ssaito S.Ssaito, Kazuyoshi Ueno

Functional Control Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	49-60
Journal	Stress-Induced Phenomena in Metallization, AIP Conf. Proceedings
Volume	612
Publication status	Published - 2001 Jul 1

Cite this

@article{b2d245fedb2a40b18ee991b926ba6df0,

title = "A high reliability Cu dual-damascene interconnection direct- contact via structure(Invited)",

author = "K.Ueno K.Ueno and M.Suzuki M.Suzuki and A.Mtsumoto A.Mtsumoto and K.Motoyama K.Motoyama and N.Oda N.Oda and H.Miyamoto H.Miyamoto and S.Ssaito S.Ssaito and Kazuyoshi Ueno",

year = "2001",

month = jul,

day = "1",

language = "English",

volume = "612",

pages = "49--60",

journal = "Stress-Induced Phenomena in Metallization, AIP Conf. Proceedings",

}

TY - JOUR

T1 - A high reliability Cu dual-damascene interconnection direct- contact via structure(Invited)

AU - K.Ueno, K.Ueno

AU - M.Suzuki, M.Suzuki

AU - A.Mtsumoto, A.Mtsumoto

AU - K.Motoyama, K.Motoyama

AU - N.Oda, N.Oda

AU - H.Miyamoto, H.Miyamoto

AU - S.Ssaito, S.Ssaito

AU - Ueno, Kazuyoshi

PY - 2001/7/1

Y1 - 2001/7/1

M3 - Article

VL - 612

SP - 49

EP - 60

JO - Stress-Induced Phenomena in Metallization, AIP Conf. Proceedings

JF - Stress-Induced Phenomena in Metallization, AIP Conf. Proceedings

ER -