Abstract
A high-throughput system that consists of a combinatorial tool (a sputtering deposition tool and a pulsed laser deposition tool) and two developed property screening devices was used for thermoelectric material exploration. The thermoelectric power factor (S2ν, S = Seebeck coefficient, ν = electrical conductivity) screening device allows us to measure electrical conductivity and Seebeck coefficient of over 1000 sample-points within 6h. The thermal effusivity measurement system using the frequency domain thermoreflectance technique allows us to screen thermal conductivity of combinatorial/conventional films. Illustrations of these applications are provided with a Co-Sn-Ce/Si(100) film for power factor determination and with a Ba2YCu3O7/SrTiO3(100) film for thermal conductivity derivation.
Original language | English |
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Pages (from-to) | 05EB021-05EB024 |
Journal | Japanese Journal of Applied Physics |
Volume | 48 |
Issue number | 5 PART 3 |
DOIs | |
Publication status | Published - 2009 May |
Externally published | Yes |
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)