A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network

Riyo Konno; Misato Mitsui; Hiroki Kuwano; Sumito Nagasawa; Koji Sano; Junichi Hayasaka

doi:10.1109/ICSENS.2007.4388520

A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network

Riyo Konno, Misato Mitsui, Hiroki Kuwano, Sumito Nagasawa, Koji Sano, Junichi Hayasaka

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

9 Citations (Scopus)

Abstract

This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10^-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10^-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.

Original language	English
Title of host publication	The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Pages	796-799
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2007.4388520
Publication status	Published - 2007 Dec 1
Externally published	Yes
Event	6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States Duration: 2007 Oct 28 → 2007 Oct 31

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Country	United States
City	Atlanta, GA
Period	07/10/28 → 07/10/31

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2007.4388520

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A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network. / Konno, Riyo; Mitsui, Misato; Kuwano, Hiroki; Nagasawa, Sumito; Sano, Koji; Hayasaka, Junichi.

The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007. 2007. p. 796-799 4388520 (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Konno, R, Mitsui, M, Kuwano, H, Nagasawa, S, Sano, K & Hayasaka, J 2007, A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network. in The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007., 4388520, Proceedings of IEEE Sensors, pp. 796-799, 6th IEEE Conference on SENSORS, IEEE SENSORS 2007, Atlanta, GA, United States, 07/10/28. https://doi.org/10.1109/ICSENS.2007.4388520

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abstract = "This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.",

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AU - Sano, Koji

AU - Hayasaka, Junichi

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