Abstract
This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of IEEE Sensors |
| Pages | 796-799 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2007 |
| Externally published | Yes |
| Event | 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA Duration: 2007 Oct 28 → 2007 Oct 31 |
Other
| Other | 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 |
|---|---|
| City | Atlanta, GA |
| Period | 07/10/28 → 07/10/31 |
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ASJC Scopus subject areas
- Engineering (miscellaneous)
- Electrical and Electronic Engineering
Cite this
A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network. / Konno, Riyo; Mitsui, Misato; Kuwano, Hiroki; Nagasawa, Sumito; Sano, Koji; Hayasaka, Junichi.
Proceedings of IEEE Sensors. 2007. p. 796-799 4388520.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network
AU - Konno, Riyo
AU - Mitsui, Misato
AU - Kuwano, Hiroki
AU - Nagasawa, Sumito
AU - Sano, Koji
AU - Hayasaka, Junichi
PY - 2007
Y1 - 2007
N2 - This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.
AB - This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.
UR - http://www.scopus.com/inward/record.url?scp=48349118680&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=48349118680&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2007.4388520
DO - 10.1109/ICSENS.2007.4388520
M3 - Conference contribution
SN - 1424412617
SN - 9781424412617
SP - 796
EP - 799
BT - Proceedings of IEEE Sensors
ER -