A Micro Electric Power Generator Using a Hybrid Si Micro Cantilever Structure

Takafumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano

Research output: Contribution to journal › Article

Original languageEnglish
Pages (from-to)301-304
JournalProceedings of PowerMEMS2008+μEMS2008
Publication statusPublished - 2008 Apr 1

Cite this

A Micro Electric Power Generator Using a Hybrid Si Micro Cantilever Structure. / Suzuki, Takafumi; Nagasawa, Sumito; Okamoto, Hiroshi; Kuwano, Hiroki.

In: Proceedings of PowerMEMS2008+μEMS2008, 01.04.2008, p. 301-304.

Research output: Contribution to journal › Article

Suzuki, T, Nagasawa, S, Okamoto, H & Kuwano, H 2008, 'A Micro Electric Power Generator Using a Hybrid Si Micro Cantilever Structure', Proceedings of PowerMEMS2008+μEMS2008, pp. 301-304.
Suzuki T, Nagasawa S, Okamoto H, Kuwano H. A Micro Electric Power Generator Using a Hybrid Si Micro Cantilever Structure. Proceedings of PowerMEMS2008+μEMS2008. 2008 Apr 1;301-304.
Suzuki, Takafumi ; Nagasawa, Sumito ; Okamoto, Hiroshi ; Kuwano, Hiroki. / A Micro Electric Power Generator Using a Hybrid Si Micro Cantilever Structure. In: Proceedings of PowerMEMS2008+μEMS2008. 2008 ; pp. 301-304.
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