A Micro Electric Power Generator Using a Hybrid Si Micro Cantilever Structure

Takafumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	301-304
Journal	Proceedings of PowerMEMS2008+μEMS2008
Publication status	Published - 2008 Apr 1

@article{df33296b24124ab8a178a9d1add57867,

title = "A Micro Electric Power Generator Using a Hybrid Si Micro Cantilever Structure",

author = "Takafumi Suzuki and Sumito Nagasawa and Hiroshi Okamoto and Hiroki Kuwano",

year = "2008",

month = "4",

day = "1",

language = "English",

pages = "301--304",

journal = "Proceedings of PowerMEMS2008+μEMS2008",

}