Original language | English |
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Pages (from-to) | 301-304 |
Journal | Proceedings of PowerMEMS2008+μEMS2008 |
Publication status | Published - 2008 Apr 1 |
A Micro Electric Power Generator Using a Hybrid Si Micro Cantilever Structure
Takafumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano
Research output: Contribution to journal › Article › peer-review