A Micro Electric Power Generator Using a Hybrid Si Micro Cantilever Structure

Takafumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)301-304
JournalProceedings of PowerMEMS2008+μEMS2008
Publication statusPublished - 2008 Apr 1

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