A Micro Electric Power Generator Using Cantilever Consisting of Silicon and Polymer

Yasunori Wada, Takahumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)37-38
JournalProceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010),
Publication statusPublished - 2010 Jun 29

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