Original language | English |
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Pages (from-to) | 37-38 |
Journal | Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010), |
Publication status | Published - 2010 Jun 29 |
A Micro Electric Power Generator Using Cantilever Consisting of Silicon and Polymer
Yasunori Wada, Takahumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano
Research output: Contribution to journal › Article › peer-review