A Micro Electric Power Generator Using Cantilever Consisting of Silicon and Polymer

Yasunori Wada, Takahumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	37-38
Journal	Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010),
Publication status	Published - 2010 Jun 29

Cite this

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title = "A Micro Electric Power Generator Using Cantilever Consisting of Silicon and Polymer",

author = "Yasunori Wada and Takahumi Suzuki and Sumito Nagasawa and Hiroshi Okamoto and Hiroki Kuwano",

year = "2010",

month = jun,

day = "29",

language = "English",

pages = "37--38",

journal = "Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010),",

}

TY - JOUR

T1 - A Micro Electric Power Generator Using Cantilever Consisting of Silicon and Polymer

AU - Wada, Yasunori

AU - Suzuki, Takahumi

AU - Nagasawa, Sumito

AU - Okamoto, Hiroshi

AU - Kuwano, Hiroki

PY - 2010/6/29

Y1 - 2010/6/29

M3 - Article

SP - 37

EP - 38

JO - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010),

JF - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010),

ER -