A micro-structured Si-based electrodes for high capacity electrical double layer capacitors

Valdas Krikscikas; Hiroyuki Oguchi; Hiroshi Yanazawa; Motoaki Hara; Hiroki Kuwano

doi:10.1088/1742-6596/557/1/012045

A micro-structured Si-based electrodes for high capacity electrical double layer capacitors

Valdas Krikscikas, Hiroyuki Oguchi, Hiroshi Yanazawa, Motoaki Hara, Hiroki Kuwano

Research output: Contribution to journal › Conference article › peer-review

Abstract

We challenged to make basis for Si electrodes of electric double layer capacitors (EDLC) used as a power source of micro-sensor nodes. Mcroelectromechanical systems (MEMS) processes were successfully introduced to fabricate micro-structured Si-based electrodes to obtain high surface area which leads to high capacity of EDLCs. Study of fundamental properties revealed that the microstructured electrodes benefit from good wettability to electrolytes, but suffer from electric resistance. We found that this problem can be solved by metal-coating of the electrode surface. Finally we build an EDLC consisting of Au-coated micro-structured Si electrodes. This EDLC showed capacity of 14.3 mF/cm₂, which is about 530 times larger than that of an EDLC consisting of flat Au electrodes.

Original language	English
Article number	012045
Journal	Journal of Physics: Conference Series
Volume	557
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/557/1/012045
Publication status	Published - 2014
Externally published	Yes
Event	14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014 - Awaji Island, Hyogo, Japan Duration: 2014 Nov 18 → 2014 Nov 21

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1088/1742-6596/557/1/012045

Cite this

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title = "A micro-structured Si-based electrodes for high capacity electrical double layer capacitors",

abstract = "We challenged to make basis for Si electrodes of electric double layer capacitors (EDLC) used as a power source of micro-sensor nodes. Mcroelectromechanical systems (MEMS) processes were successfully introduced to fabricate micro-structured Si-based electrodes to obtain high surface area which leads to high capacity of EDLCs. Study of fundamental properties revealed that the microstructured electrodes benefit from good wettability to electrolytes, but suffer from electric resistance. We found that this problem can be solved by metal-coating of the electrode surface. Finally we build an EDLC consisting of Au-coated micro-structured Si electrodes. This EDLC showed capacity of 14.3 mF/cm2, which is about 530 times larger than that of an EDLC consisting of flat Au electrodes.",

author = "Valdas Krikscikas and Hiroyuki Oguchi and Hiroshi Yanazawa and Motoaki Hara and Hiroki Kuwano",

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AU - Krikscikas, Valdas

AU - Oguchi, Hiroyuki

AU - Yanazawa, Hiroshi

AU - Hara, Motoaki

AU - Kuwano, Hiroki

N1 - Publisher Copyright: © Published under licence by IOP Publishing Ltd.

PY - 2014

Y1 - 2014

N2 - We challenged to make basis for Si electrodes of electric double layer capacitors (EDLC) used as a power source of micro-sensor nodes. Mcroelectromechanical systems (MEMS) processes were successfully introduced to fabricate micro-structured Si-based electrodes to obtain high surface area which leads to high capacity of EDLCs. Study of fundamental properties revealed that the microstructured electrodes benefit from good wettability to electrolytes, but suffer from electric resistance. We found that this problem can be solved by metal-coating of the electrode surface. Finally we build an EDLC consisting of Au-coated micro-structured Si electrodes. This EDLC showed capacity of 14.3 mF/cm2, which is about 530 times larger than that of an EDLC consisting of flat Au electrodes.

AB - We challenged to make basis for Si electrodes of electric double layer capacitors (EDLC) used as a power source of micro-sensor nodes. Mcroelectromechanical systems (MEMS) processes were successfully introduced to fabricate micro-structured Si-based electrodes to obtain high surface area which leads to high capacity of EDLCs. Study of fundamental properties revealed that the microstructured electrodes benefit from good wettability to electrolytes, but suffer from electric resistance. We found that this problem can be solved by metal-coating of the electrode surface. Finally we build an EDLC consisting of Au-coated micro-structured Si electrodes. This EDLC showed capacity of 14.3 mF/cm2, which is about 530 times larger than that of an EDLC consisting of flat Au electrodes.

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A micro-structured Si-based electrodes for high capacity electrical double layer capacitors

Abstract

ASJC Scopus subject areas

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