A new metallic glass Fe-B-Nd-Nb thin film material for micro sensors and actuators: Fabrication and characterization

P. A. Tuan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, H. Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the first half of this paper we reports on the development of a Fe-B-Nd-Nb quaternary alloy magnetic metallic glass thin film. The Fe-B-Nd-Nb thin film deposited on the Si (100) substrate underwent crystallographic and thermal characterization to confirm its metallic glass state. In the second half of this paper we reports on the direct fracture toughness of the micro structure composed of the Fe-B-Nd-Nb metallic glass thin film using the micro device specially designed. The measurement revealed that the fracture toughness of the Fe-B-Nd-Nb metallic glass thin film is 6.4 MPa·m1/2, which is about four times higher than that of silicon.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1040-1043
Number of pages4
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 2013 Jun 162013 Jun 20

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Conference

Conference2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period13/6/1613/6/20

Keywords

  • fracture toughness
  • MEMS
  • metallic glass thin film

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Tuan, P. A., Oguchi, H., Hara, M., Shikida, M., Hida, H., Ando, T., Sato, K., & Kuwano, H. (2013). A new metallic glass Fe-B-Nd-Nb thin film material for micro sensors and actuators: Fabrication and characterization. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 1040-1043). [6626948] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6626948