Original language | English |
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Pages (from-to) | 279-285 |
Journal | Proceedings of 5th IEEE VLSI Multilevel Interconnection Conference |
Publication status | Published - 1988 Jun 13 |
A New Polyimide Siloxane Film for Interlayer Dielectrics in Sub-micron Multilevel Interconnection
T.Homma T.Homma, K.Eguchi K.Eguchi, Y.Numasawa Y.Numasawa, T.Kikkawa T.Kikkawa, Y.Hokari Y.Hokari, K.Hamano K.Hamano, Tetsuya Homma
Research output: Contribution to journal › Article › peer-review
7
Citations
(Scopus)