A new technique for controlling the dopant concentration in the double-crucible method

Naoki Ono; Michio kida; Yoshiaki Arai; Keisei Abe; Kensho Sahira

doi:10.1016/0022-0248(94)90763-3

A new technique for controlling the dopant concentration in the double-crucible method

Naoki Ono, Michio kida, Yoshiaki Arai, Keisei Abe, Kensho Sahira

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

A new doping procedure for keeping the dopant concentration of the crystal constant in a continuous Czochralski method, using a double-walled crucible, is proposed. In this method the initial concentrations in the inner and the outer crucibles are set to be equal. Therefore, the equalizing phenomena of the concentrations between the two crucibles in the initial stage do not have to be considered. The strategy for doping control in this new method is analyzed using a one-dimensional mathematical model.

Original language	English
Pages (from-to)	359-364
Number of pages	6
Journal	Journal of Crystal Growth
Volume	135
Issue number	1-2
DOIs	https://doi.org/10.1016/0022-0248(94)90763-3
Publication status	Published - 1994 Jan
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

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10.1016/0022-0248(94)90763-3

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@article{af0c0e14ce5c45b7bc91c93728fbcbf6,

title = "A new technique for controlling the dopant concentration in the double-crucible method",

abstract = "A new doping procedure for keeping the dopant concentration of the crystal constant in a continuous Czochralski method, using a double-walled crucible, is proposed. In this method the initial concentrations in the inner and the outer crucibles are set to be equal. Therefore, the equalizing phenomena of the concentrations between the two crucibles in the initial stage do not have to be considered. The strategy for doping control in this new method is analyzed using a one-dimensional mathematical model.",

author = "Naoki Ono and Michio kida and Yoshiaki Arai and Keisei Abe and Kensho Sahira",

year = "1994",

month = jan,

doi = "10.1016/0022-0248(94)90763-3",

language = "English",

volume = "135",

pages = "359--364",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "1-2",

}

TY - JOUR

T1 - A new technique for controlling the dopant concentration in the double-crucible method

AU - Ono, Naoki

AU - kida, Michio

AU - Arai, Yoshiaki

AU - Abe, Keisei

AU - Sahira, Kensho

PY - 1994/1

Y1 - 1994/1

N2 - A new doping procedure for keeping the dopant concentration of the crystal constant in a continuous Czochralski method, using a double-walled crucible, is proposed. In this method the initial concentrations in the inner and the outer crucibles are set to be equal. Therefore, the equalizing phenomena of the concentrations between the two crucibles in the initial stage do not have to be considered. The strategy for doping control in this new method is analyzed using a one-dimensional mathematical model.

AB - A new doping procedure for keeping the dopant concentration of the crystal constant in a continuous Czochralski method, using a double-walled crucible, is proposed. In this method the initial concentrations in the inner and the outer crucibles are set to be equal. Therefore, the equalizing phenomena of the concentrations between the two crucibles in the initial stage do not have to be considered. The strategy for doping control in this new method is analyzed using a one-dimensional mathematical model.

UR - http://www.scopus.com/inward/record.url?scp=0028193842&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028193842&partnerID=8YFLogxK

U2 - 10.1016/0022-0248(94)90763-3

DO - 10.1016/0022-0248(94)90763-3

M3 - Article

AN - SCOPUS:0028193842

SN - 0022-0248

VL - 135

SP - 359

EP - 364

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-2

ER -

A new technique for controlling the dopant concentration in the double-crucible method

Abstract

ASJC Scopus subject areas

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