A new technique for controlling the dopant concentration in the double-crucible method

Naoki Ono, Michio kida, Yoshiaki Arai, Keisei Abe, Kensho Sahira

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

A new doping procedure for keeping the dopant concentration of the crystal constant in a continuous Czochralski method, using a double-walled crucible, is proposed. In this method the initial concentrations in the inner and the outer crucibles are set to be equal. Therefore, the equalizing phenomena of the concentrations between the two crucibles in the initial stage do not have to be considered. The strategy for doping control in this new method is analyzed using a one-dimensional mathematical model.

Original languageEnglish
Pages (from-to)359-364
Number of pages6
JournalJournal of Crystal Growth
Volume135
Issue number1-2
DOIs
Publication statusPublished - 1994
Externally publishedYes

Fingerprint

Crucibles
crucibles
Doping (additives)
Crystal growth from melt
Czochralski method
mathematical models
Mathematical models
Crystals
crystals

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

A new technique for controlling the dopant concentration in the double-crucible method. / Ono, Naoki; kida, Michio; Arai, Yoshiaki; Abe, Keisei; Sahira, Kensho.

In: Journal of Crystal Growth, Vol. 135, No. 1-2, 1994, p. 359-364.

Research output: Contribution to journalArticle

Ono, Naoki ; kida, Michio ; Arai, Yoshiaki ; Abe, Keisei ; Sahira, Kensho. / A new technique for controlling the dopant concentration in the double-crucible method. In: Journal of Crystal Growth. 1994 ; Vol. 135, No. 1-2. pp. 359-364.
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