A New Trench Isolation Technology as A Replacement of LOCOS

H.Mikoshiba H.Mikoshiba, T.Homma T.Homma, K.Hamano K.Hamano, Tetsuya Homma

Research output: Contribution to journalArticle

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)578-581
JournalProceedings of IEEE International Electron Devices Meeting
Publication statusPublished - 1984 Dec 9

Cite this

A New Trench Isolation Technology as A Replacement of LOCOS. / H.Mikoshiba, H.Mikoshiba; T.Homma, T.Homma; K.Hamano, K.Hamano; Homma, Tetsuya.

In: Proceedings of IEEE International Electron Devices Meeting, 09.12.1984, p. 578-581.

Research output: Contribution to journalArticle

H.Mikoshiba, H.Mikoshiba ; T.Homma, T.Homma ; K.Hamano, K.Hamano ; Homma, Tetsuya. / A New Trench Isolation Technology as A Replacement of LOCOS. In: Proceedings of IEEE International Electron Devices Meeting. 1984 ; pp. 578-581.
@article{3584f1bcc2ea4687926343bff303dca2,
title = "A New Trench Isolation Technology as A Replacement of LOCOS",
author = "H.Mikoshiba H.Mikoshiba and T.Homma T.Homma and K.Hamano K.Hamano and Tetsuya Homma",
year = "1984",
month = "12",
day = "9",
language = "English",
pages = "578--581",
journal = "Proceedings of IEEE International Electron Devices Meeting",

}

TY - JOUR

T1 - A New Trench Isolation Technology as A Replacement of LOCOS

AU - H.Mikoshiba, H.Mikoshiba

AU - T.Homma, T.Homma

AU - K.Hamano, K.Hamano

AU - Homma, Tetsuya

PY - 1984/12/9

Y1 - 1984/12/9

M3 - Article

SP - 578

EP - 581

JO - Proceedings of IEEE International Electron Devices Meeting

JF - Proceedings of IEEE International Electron Devices Meeting

ER -