A New Trench Isolation Technology as A Replacement of LOCOS

H.Mikoshiba H.Mikoshiba, T.Homma T.Homma, K.Hamano K.Hamano, Tetsuya Homma

Research output: Contribution to journalArticle

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)578-581
JournalProceedings of IEEE International Electron Devices Meeting
Publication statusPublished - 1984 Dec 9

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