A new two step metal CMP technique for a high performance multilevel interconnects featured by Al-and Cu in low - , organic film metallization

Y.Hayashi Y.Hayashi, T.Onodera T.Onodera, T.Nakajima T.Nakajima, K.Kikuta K.Kikuta, Y.Tsuchiya Y.Tsuchiya, J.Kawahara J.Kawahara, S.Takahashi S.Takahashi, K.Ueno K.Ueno, S.Chikaki S.Chikaki, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)88-89
Journal1996 Symposium on VLSI Technology Digest of Technical Papers
Publication statusPublished - 1997 Jun 1

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A new two step metal CMP technique for a high performance multilevel interconnects featured by Al-and Cu in low - , organic film metallization. / Y.Hayashi, Y.Hayashi; T.Onodera, T.Onodera; T.Nakajima, T.Nakajima; K.Kikuta, K.Kikuta; Y.Tsuchiya, Y.Tsuchiya; J.Kawahara, J.Kawahara; S.Takahashi, S.Takahashi; K.Ueno, K.Ueno; S.Chikaki, S.Chikaki; Ueno, Kazuyoshi.

In: 1996 Symposium on VLSI Technology Digest of Technical Papers, 01.06.1997, p. 88-89.

Research output: Contribution to journalArticle

Y.Hayashi, YH, T.Onodera, TO, T.Nakajima, TN, K.Kikuta, KK, Y.Tsuchiya, YT, J.Kawahara, JK, S.Takahashi, ST, K.Ueno, KU, S.Chikaki, SC & Ueno, K 1997, 'A new two step metal CMP technique for a high performance multilevel interconnects featured by Al-and Cu in low - , organic film metallization', 1996 Symposium on VLSI Technology Digest of Technical Papers, pp. 88-89.
Y.Hayashi, Y.Hayashi ; T.Onodera, T.Onodera ; T.Nakajima, T.Nakajima ; K.Kikuta, K.Kikuta ; Y.Tsuchiya, Y.Tsuchiya ; J.Kawahara, J.Kawahara ; S.Takahashi, S.Takahashi ; K.Ueno, K.Ueno ; S.Chikaki, S.Chikaki ; Ueno, Kazuyoshi. / A new two step metal CMP technique for a high performance multilevel interconnects featured by Al-and Cu in low - , organic film metallization. In: 1996 Symposium on VLSI Technology Digest of Technical Papers. 1997 ; pp. 88-89.
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author = "Y.Hayashi Y.Hayashi and T.Onodera T.Onodera and T.Nakajima T.Nakajima and K.Kikuta K.Kikuta and Y.Tsuchiya Y.Tsuchiya and J.Kawahara J.Kawahara and S.Takahashi S.Takahashi and K.Ueno K.Ueno and S.Chikaki S.Chikaki and Kazuyoshi Ueno",
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AU - T.Nakajima, T.Nakajima

AU - K.Kikuta, K.Kikuta

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AU - S.Takahashi, S.Takahashi

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