A Novel Process for Emitter-Base-Collector Self-Aligned Heterojunction Bipolar Transistors Using a Pattern-Inversion Method

S.Tanaka S.Tanaka, S.Tanaka M.Madihian H.Toyoshima, K.Honjo K.Honjo, Shinichi Tanaka

Research output: Contribution to journalArticle

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)562-564
JournalElectronics Letters
Volume23
Publication statusPublished - 1987 May 1

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