A Novel Process for Emitter-Base-Collector Self-Aligned Heterojunction Bipolar Transistors Using a Pattern-Inversion Method

S.Tanaka S.Tanaka, S.Tanaka M.Madihian H.Toyoshima, K.Honjo K.Honjo, Shinichi Tanaka

Research output: Contribution to journalArticle

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)562-564
JournalElectronics Letters
Volume23
Publication statusPublished - 1987 May 1

Cite this

A Novel Process for Emitter-Base-Collector Self-Aligned Heterojunction Bipolar Transistors Using a Pattern-Inversion Method. / S.Tanaka, S.Tanaka; H.Toyoshima, S.Tanaka M.Madihian; K.Honjo, K.Honjo; Tanaka, Shinichi.

In: Electronics Letters, Vol. 23, 01.05.1987, p. 562-564.

Research output: Contribution to journalArticle

S.Tanaka, S.Tanaka ; H.Toyoshima, S.Tanaka M.Madihian ; K.Honjo, K.Honjo ; Tanaka, Shinichi. / A Novel Process for Emitter-Base-Collector Self-Aligned Heterojunction Bipolar Transistors Using a Pattern-Inversion Method. In: Electronics Letters. 1987 ; Vol. 23. pp. 562-564.
@article{bd11002da2d1441187997e85b39ea313,
title = "A Novel Process for Emitter-Base-Collector Self-Aligned Heterojunction Bipolar Transistors Using a Pattern-Inversion Method",
author = "S.Tanaka S.Tanaka and H.Toyoshima, {S.Tanaka M.Madihian} and K.Honjo K.Honjo and Shinichi Tanaka",
year = "1987",
month = "5",
day = "1",
language = "English",
volume = "23",
pages = "562--564",
journal = "Electronics Letters",
issn = "0013-5194",
publisher = "Institution of Engineering and Technology",

}

TY - JOUR

T1 - A Novel Process for Emitter-Base-Collector Self-Aligned Heterojunction Bipolar Transistors Using a Pattern-Inversion Method

AU - S.Tanaka, S.Tanaka

AU - H.Toyoshima, S.Tanaka M.Madihian

AU - K.Honjo, K.Honjo

AU - Tanaka, Shinichi

PY - 1987/5/1

Y1 - 1987/5/1

M3 - Article

VL - 23

SP - 562

EP - 564

JO - Electronics Letters

JF - Electronics Letters

SN - 0013-5194

ER -