A novel scanning thermal microscopy system

Kastuhiro Tanaka, Hiroki Kuwano, Sumito Nagasawa, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper describes a concept, fabrication and evaluation of a novel nano-meter scale Scanning Thermal Microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.

Original languageEnglish
Title of host publicationProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages627-630
Number of pages4
Publication statusPublished - 2007 Dec 1
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 2007 Jan 212007 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
CountryJapan
CityKobe
Period07/1/2107/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Tanaka, K., Kuwano, H., Nagasawa, S., & Ono, T. (2007). A novel scanning thermal microscopy system. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007 (pp. 627-630). [4433123] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).