TY - GEN
T1 - A novel scanning thermal microscopy system
AU - Tanaka, Kastuhiro
AU - Kuwano, Hiroki
AU - Nagasawa, Sumito
AU - Ono, Takahito
PY - 2007
Y1 - 2007
N2 - This paper describes a concept, fabrication and evaluation of a novel nano-meter scale Scanning Thermal Microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.
AB - This paper describes a concept, fabrication and evaluation of a novel nano-meter scale Scanning Thermal Microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.
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M3 - Conference contribution
AN - SCOPUS:52249092175
SN - 1424409519
SN - 9781424409518
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 627
EP - 630
BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Y2 - 21 January 2007 through 25 January 2007
ER -