A novel scanning thermal microscopy system

Kastuhiro Tanaka, Hiroki Kuwano, Sumito Nagasawa, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper describes a concept, fabrication and evaluation of a novel nano-meter scale Scanning Thermal Microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages627-630
Number of pages4
Publication statusPublished - 2007
Externally publishedYes
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe
Duration: 2007 Jan 212007 Jan 25

Other

Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
CityKobe
Period07/1/2107/1/25

Fingerprint

Shielding
shielding
Microscopic examination
apertures
microscopy
Detectors
Scanning
scanning
detectors
rays
Infrared radiation
Fabrication
fabrication
evaluation
probes
Hot Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Tanaka, K., Kuwano, H., Nagasawa, S., & Ono, T. (2007). A novel scanning thermal microscopy system. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 627-630). [4433123]

A novel scanning thermal microscopy system. / Tanaka, Kastuhiro; Kuwano, Hiroki; Nagasawa, Sumito; Ono, Takahito.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. p. 627-630 4433123.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tanaka, K, Kuwano, H, Nagasawa, S & Ono, T 2007, A novel scanning thermal microscopy system. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4433123, pp. 627-630, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, 07/1/21.
Tanaka K, Kuwano H, Nagasawa S, Ono T. A novel scanning thermal microscopy system. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. p. 627-630. 4433123
Tanaka, Kastuhiro ; Kuwano, Hiroki ; Nagasawa, Sumito ; Ono, Takahito. / A novel scanning thermal microscopy system. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. pp. 627-630
@inproceedings{e6e4ab1734614b7c8db5b1049ff04669,
title = "A novel scanning thermal microscopy system",
abstract = "This paper describes a concept, fabrication and evaluation of a novel nano-meter scale Scanning Thermal Microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.",
author = "Kastuhiro Tanaka and Hiroki Kuwano and Sumito Nagasawa and Takahito Ono",
year = "2007",
language = "English",
isbn = "1424409519",
pages = "627--630",
booktitle = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

}

TY - GEN

T1 - A novel scanning thermal microscopy system

AU - Tanaka, Kastuhiro

AU - Kuwano, Hiroki

AU - Nagasawa, Sumito

AU - Ono, Takahito

PY - 2007

Y1 - 2007

N2 - This paper describes a concept, fabrication and evaluation of a novel nano-meter scale Scanning Thermal Microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.

AB - This paper describes a concept, fabrication and evaluation of a novel nano-meter scale Scanning Thermal Microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.

UR - http://www.scopus.com/inward/record.url?scp=52249092175&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=52249092175&partnerID=8YFLogxK

M3 - Conference contribution

SN - 1424409519

SN - 9781424409518

SP - 627

EP - 630

BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ER -