A numerical study of the effects of electromagnetic stirring on the distributions of temperature and oxygen concentration in silicon double-crucible Czochralski processing

Naoki Ono, Gerardo Trapaga

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The effect of providing electromagnetic stirring of the melt contained in the double crucible in continuous Czochralski method was explored by a mathematical model. It was found that the surface temperature of the melt in the annular region was significantly increased by the stirring, which is quite beneficial for melting the solid feed material, and that the stirring could decrease the oxygen concentration at the crystal/melt interface. Moreover, a multiturned coils system in each phase current was found to be more efficient for driving the convection than the single-turned coils system. The multiturned coils system showed that the temperature increase at the melt surface in the annular region became saturated when the current frequency was very high. Moreover, the oxygen concentration at the melt/crystal interface had a minimum value as the frequency was increased. Electromagnetic stirring may make very positive contributions to the performance of the continuous Czochralski system.

Original languageEnglish
Pages (from-to)764-772
Number of pages9
JournalJournal of the Electrochemical Society
Volume144
Issue number2
Publication statusPublished - 1997 Feb
Externally publishedYes

Fingerprint

Crucibles
Silicon
crucibles
stirring
electromagnetism
Oxygen
Crystals
Crystal growth from melt
silicon
oxygen
Processing
coils
Melting
Mathematical models
Temperature
temperature
very high frequencies
Czochralski method
surface temperature
crystals

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

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abstract = "The effect of providing electromagnetic stirring of the melt contained in the double crucible in continuous Czochralski method was explored by a mathematical model. It was found that the surface temperature of the melt in the annular region was significantly increased by the stirring, which is quite beneficial for melting the solid feed material, and that the stirring could decrease the oxygen concentration at the crystal/melt interface. Moreover, a multiturned coils system in each phase current was found to be more efficient for driving the convection than the single-turned coils system. The multiturned coils system showed that the temperature increase at the melt surface in the annular region became saturated when the current frequency was very high. Moreover, the oxygen concentration at the melt/crystal interface had a minimum value as the frequency was increased. Electromagnetic stirring may make very positive contributions to the performance of the continuous Czochralski system.",
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AB - The effect of providing electromagnetic stirring of the melt contained in the double crucible in continuous Czochralski method was explored by a mathematical model. It was found that the surface temperature of the melt in the annular region was significantly increased by the stirring, which is quite beneficial for melting the solid feed material, and that the stirring could decrease the oxygen concentration at the crystal/melt interface. Moreover, a multiturned coils system in each phase current was found to be more efficient for driving the convection than the single-turned coils system. The multiturned coils system showed that the temperature increase at the melt surface in the annular region became saturated when the current frequency was very high. Moreover, the oxygen concentration at the melt/crystal interface had a minimum value as the frequency was increased. Electromagnetic stirring may make very positive contributions to the performance of the continuous Czochralski system.

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