A numerical study of the influence of feeding polycrystalline silicon granules on melt temperature in the continuous Czochralski process

Naoki Ono, Michio Kida, Yoshiaki Arai, Kensho Sahira

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Temperature change was simulated using a solid body rotating melt model when solid polycrystalline silicon granules were supplied to a melt in a double-crucible method. Only heat conduction was considered in the analysis. The influence of the crucible rotation rates and of the initial temperature of the supplied silicon was investigated systematically and quantitatively. The influence of the crucible rotation rate was stronger than expected, which suggests that the crucible rotation rate cannot be lowered too much because of the possibility of the melt solidifying between the inner and outer crucibles.

Original languageEnglish
Pages (from-to)297-304
Number of pages8
JournalJournal of Crystal Growth
Volume132
Issue number1-2
DOIs
Publication statusPublished - 1993 Sep 1
Externally publishedYes

Fingerprint

Crucibles
crucibles
Polysilicon
silicon
Temperature
temperature
rotating bodies
Silicon
Heat conduction
conductive heat transfer

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

A numerical study of the influence of feeding polycrystalline silicon granules on melt temperature in the continuous Czochralski process. / Ono, Naoki; Kida, Michio; Arai, Yoshiaki; Sahira, Kensho.

In: Journal of Crystal Growth, Vol. 132, No. 1-2, 01.09.1993, p. 297-304.

Research output: Contribution to journalArticle

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