A Numerical Study on the Effect of Electromagnetic Stirring on the Distributions of Temperature and Oxygen Concentration Silicon Double-Crucible Czochralski Processing.

Naoki Ono

A Numerical Study on the Effect of Electromagnetic Stirring on the Distributions of Temperature and Oxygen Concentration Silicon Double-Crucible Czochralski Processing.

Regional Environment Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	740-740
Journal	The Electrochemical Society
Publication status	Published - 1994 Oct 1

Cite this

@article{e2f84b36591e42d98592621a2c7468d2,

title = "A Numerical Study on the Effect of Electromagnetic Stirring on the Distributions of Temperature and Oxygen Concentration Silicon Double-Crucible Czochralski Processing.",

author = "Naoki Ono",

year = "1994",

month = oct,

day = "1",

language = "English",

pages = "740--740",

journal = "The Electrochemical Society",

}