Original language | English |
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Pages (from-to) | 503-514 |
Journal | Electrochemical Society "Semiconductor Silicon 1998" meeting proceeding |
Volume | 1998-1 |
Publication status | Published - 1998 May 1 |
A Numerical Study on the Macroscopic Kinetics of the Ring-OSF in the Silicon CZ Growth by the Model Using Self-Interstitials as the Dominant Diffusers.
Naoki Ono, Kazuhiro Harada, Jun Furukawa, Kazuya Suzuki, Michio Kida, Yasushi Shimanuki
Research output: Contribution to journal › Article › peer-review