A Numerical Study on the Macroscopic Kinetics of the Ring-OSF in the Silicon CZ Growth by the Model Using Self-Interstitials as the Dominant Diffusers.

Naoki Ono, Kazuhiro Harada, Jun Furukawa, Kazuya Suzuki, Michio Kida, Yasushi Shimanuki

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)503-514
JournalElectrochemical Society "Semiconductor Silicon 1998" meeting proceeding
Volume1998-1
Publication statusPublished - 1998 May 1

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