A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials

T.Homma T.Homma, H.Kokubun H.Kokubun, A.Takasaki A.Takasaki, H.Machida H.Machida, M.Yamaguchi M.Yamaguchi, Tetsuya Homma

Research output: Contribution to journalArticle

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)580-585
JournalJournal of the Electrochemical Society
Volume147
Publication statusPublished - 2000 Feb 1

Cite this

T.Homma, T. H., H.Kokubun, H. K., A.Takasaki, A. T., H.Machida, H. M., M.Yamaguchi, M. Y., & Homma, T. (2000). A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials. Journal of the Electrochemical Society, 147, 580-585.