A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials

T.Homma T.Homma, H.Kokubun H.Kokubun, A.Takasaki A.Takasaki, H.Machida H.Machida, M.Yamaguchi M.Yamaguchi, Tetsuya Homma

Research output: Contribution to journalArticle

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)580-585
JournalJournal of the Electrochemical Society
Volume147
Publication statusPublished - 2000 Feb 1

Cite this

T.Homma, T. H., H.Kokubun, H. K., A.Takasaki, A. T., H.Machida, H. M., M.Yamaguchi, M. Y., & Homma, T. (2000). A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials. Journal of the Electrochemical Society, 147, 580-585.

A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials. / T.Homma, T.Homma; H.Kokubun, H.Kokubun; A.Takasaki, A.Takasaki; H.Machida, H.Machida; M.Yamaguchi, M.Yamaguchi; Homma, Tetsuya.

In: Journal of the Electrochemical Society, Vol. 147, 01.02.2000, p. 580-585.

Research output: Contribution to journalArticle

T.Homma, TH, H.Kokubun, HK, A.Takasaki, AT, H.Machida, HM, M.Yamaguchi, MY & Homma, T 2000, 'A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials', Journal of the Electrochemical Society, vol. 147, pp. 580-585.
T.Homma TH, H.Kokubun HK, A.Takasaki AT, H.Machida HM, M.Yamaguchi MY, Homma T. A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials. Journal of the Electrochemical Society. 2000 Feb 1;147:580-585.
T.Homma, T.Homma ; H.Kokubun, H.Kokubun ; A.Takasaki, A.Takasaki ; H.Machida, H.Machida ; M.Yamaguchi, M.Yamaguchi ; Homma, Tetsuya. / A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials. In: Journal of the Electrochemical Society. 2000 ; Vol. 147. pp. 580-585.
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