A quarter-micron planarized interconnection technology with self-aligned plug

K.Ueno K.Ueno, K.Ohto K.Ohto, K.Tsunenari K.Tsunenari, K.Kajiyana K.Kajiyana, K.Kikuta K.Kikuta, T.Kikkawa T.Kikkawa, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)305-308
Journal1992 IEDM Technical Digest
Publication statusPublished - 1992 Dec 1

Cite this

K.Ueno, K. U., K.Ohto, K. O., K.Tsunenari, K. T., K.Kajiyana, K. K., K.Kikuta, K. K., T.Kikkawa, T. K., & Ueno, K. (1992). A quarter-micron planarized interconnection technology with self-aligned plug. 1992 IEDM Technical Digest, 305-308.