A quarter-micron planarized interconnection technology with self-aligned plug

K.Ueno K.Ueno, K.Ohto K.Ohto, K.Tsunenari K.Tsunenari, K.Kajiyana K.Kajiyana, K.Kikuta K.Kikuta, T.Kikkawa T.Kikkawa, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)305-308
Journal1992 IEDM Technical Digest
Publication statusPublished - 1992 Dec 1

Cite this

K.Ueno, K. U., K.Ohto, K. O., K.Tsunenari, K. T., K.Kajiyana, K. K., K.Kikuta, K. K., T.Kikkawa, T. K., & Ueno, K. (1992). A quarter-micron planarized interconnection technology with self-aligned plug. 1992 IEDM Technical Digest, 305-308.

A quarter-micron planarized interconnection technology with self-aligned plug. / K.Ueno, K.Ueno; K.Ohto, K.Ohto; K.Tsunenari, K.Tsunenari; K.Kajiyana, K.Kajiyana; K.Kikuta, K.Kikuta; T.Kikkawa, T.Kikkawa; Ueno, Kazuyoshi.

In: 1992 IEDM Technical Digest, 01.12.1992, p. 305-308.

Research output: Contribution to journalArticle

K.Ueno, KU, K.Ohto, KO, K.Tsunenari, KT, K.Kajiyana, KK, K.Kikuta, KK, T.Kikkawa, TK & Ueno, K 1992, 'A quarter-micron planarized interconnection technology with self-aligned plug', 1992 IEDM Technical Digest, pp. 305-308.
K.Ueno KU, K.Ohto KO, K.Tsunenari KT, K.Kajiyana KK, K.Kikuta KK, T.Kikkawa TK et al. A quarter-micron planarized interconnection technology with self-aligned plug. 1992 IEDM Technical Digest. 1992 Dec 1;305-308.
K.Ueno, K.Ueno ; K.Ohto, K.Ohto ; K.Tsunenari, K.Tsunenari ; K.Kajiyana, K.Kajiyana ; K.Kikuta, K.Kikuta ; T.Kikkawa, T.Kikkawa ; Ueno, Kazuyoshi. / A quarter-micron planarized interconnection technology with self-aligned plug. In: 1992 IEDM Technical Digest. 1992 ; pp. 305-308.
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AU - K.Kajiyana, K.Kajiyana

AU - K.Kikuta, K.Kikuta

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AU - Ueno, Kazuyoshi

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