A quarter-micron planarized interconnection technology with self-aligned plug

K.Ueno K.Ueno, K.Ohto K.Ohto, K.Tsunenari K.Tsunenari, K.Kajiyana K.Kajiyana, K.Kikuta K.Kikuta, T.Kikkawa T.Kikkawa, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)305-308
Journal1992 IEDM Technical Digest
Publication statusPublished - 1992 Dec 1

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