A Selective SiO2 Film-Formation Technology Using Liquid-Phase Deposition for Fully Planarized Multilevel Interconnections

Tetsuya Homma, Takuya Katoh, Yoshiaki Yamada, Yukinobu Murao

Research output: Contribution to journalArticlepeer-review

66 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science