A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature

T.Homma T.Homma, Y.Murao Y.Murao, Tetsuya Homma

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)
Original languageEnglish
Pages (from-to)2046-2051
JournalJournal of the Electrochemical Society
Volume140
Publication statusPublished - 1993 Jul 1

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