| Original language | English |
|---|---|
| Pages (from-to) | 2046-2051 |
| Journal | Journal of the Electrochemical Society |
| Volume | 140 |
| Publication status | Published - 1993 Jul 1 |
Cite this
T.Homma, T. H., Y.Murao, Y. M., & Homma, T. (1993). A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature. Journal of the Electrochemical Society, 140, 2046-2051.
A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature. / T.Homma, T.Homma; Y.Murao, Y.Murao; Homma, Tetsuya.
In: Journal of the Electrochemical Society, Vol. 140, 01.07.1993, p. 2046-2051.Research output: Contribution to journal › Article
T.Homma, TH, Y.Murao, YM & Homma, T 1993, 'A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature', Journal of the Electrochemical Society, vol. 140, pp. 2046-2051.
T.Homma TH, Y.Murao YM, Homma T. A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature. Journal of the Electrochemical Society. 1993 Jul 1;140:2046-2051.
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AU - T.Homma, T.Homma
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AU - Homma, Tetsuya
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