A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature

T.Homma T.Homma, Y.Murao Y.Murao, Tetsuya Homma

Research output: Contribution to journalArticle

18 Citations (Scopus)
Original languageEnglish
Pages (from-to)2046-2051
JournalJournal of the Electrochemical Society
Volume140
Publication statusPublished - 1993 Jul 1

Cite this

A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature. / T.Homma, T.Homma; Y.Murao, Y.Murao; Homma, Tetsuya.

In: Journal of the Electrochemical Society, Vol. 140, 01.07.1993, p. 2046-2051.

Research output: Contribution to journalArticle

@article{813a6b14694f4f7ab4681764d2955e77,
title = "A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature",
author = "T.Homma T.Homma and Y.Murao Y.Murao and Tetsuya Homma",
year = "1993",
month = "7",
day = "1",
language = "English",
volume = "140",
pages = "2046--2051",
journal = "Journal of the Electrochemical Society",
issn = "0013-4651",
publisher = "Electrochemical Society, Inc.",

}

TY - JOUR

T1 - A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature

AU - T.Homma, T.Homma

AU - Y.Murao, Y.Murao

AU - Homma, Tetsuya

PY - 1993/7/1

Y1 - 1993/7/1

M3 - Article

VL - 140

SP - 2046

EP - 2051

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

SN - 0013-4651

ER -