Original language | English |
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Pages (from-to) | 2046-2051 |
Journal | Journal of the Electrochemical Society |
Volume | 140 |
Publication status | Published - 1993 Jul 1 |
A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature
T.Homma T.Homma, Y.Murao Y.Murao, Tetsuya Homma
Research output: Contribution to journal › Article › peer-review
18
Citations
(Scopus)