A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature

T.Homma T.Homma, Y.Murao Y.Murao, Tetsuya Homma

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	2046-2051
Journal	Journal of the Electrochemical Society
Volume	140
Publication status	Published - 1993 Jul 1

@article{813a6b14694f4f7ab4681764d2955e77,

title = "A Spin-on-Glass Film Treatment Technology Using A Fluoroalkoxysil-ane vapor at Room Temperature",

author = "T.Homma T.Homma and Y.Murao Y.Murao and Tetsuya Homma",

year = "1993",

month = "7",

day = "1",

language = "English",

volume = "140",

pages = "2046--2051",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Electrochemical Society, Inc.",

}