A Spin-On-Glass Film Treatment Technology Using a Fluoroalkoxysilane Vapor at Room Temperature

Tetsuya Homma, Yukinobu Murao

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Fingerprint

Dive into the research topics of 'A Spin-On-Glass Film Treatment Technology Using a Fluoroalkoxysilane Vapor at Room Temperature'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds