A Statistical Process Control Method for Semiconductor Manufacturing

Tomoaki Kubo, Tomomi Ino, Masateru Minami, Tetsuya Homma

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)246-254
JournalSICE Journal of Control and Measurement System Integration
Volume2
Publication statusPublished - 2009 Aug 3

Cite this

A Statistical Process Control Method for Semiconductor Manufacturing. / Kubo, Tomoaki; Ino, Tomomi; Minami, Masateru; Homma, Tetsuya.

In: SICE Journal of Control and Measurement System Integration, Vol. 2, 03.08.2009, p. 246-254.

Research output: Contribution to journalArticle

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