A Statistical Process Control Method for Semiconductor Manufacturing

Tomoaki Kubo, Tomomi Ino, Masateru Minami, Tetsuya Homma

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)246-254
JournalSICE Journal of Control and Measurement System Integration
Volume2
Publication statusPublished - 2009 Aug 3

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