Original language | English |
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Pages (from-to) | 15 |
Journal | Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007) |
Publication status | Published - 2007 Apr 1 |
A surface acoustic wave dynamic control device by grating structure
Masahiro Miyashita, Teppei Onuki, Sumito Nagasawa, Hiroki Kuwano
Research output: Contribution to journal › Article › peer-review