TY - GEN
T1 - A surface acoustic wave dynamics control device by grating structure
AU - Miyashita, Masahiro
AU - Onuki, Teppei
AU - Nagasawa, Sumito
AU - Kuwano, Hiroshi
PY - 2008/8/29
Y1 - 2008/8/29
N2 - We have developed the dynamic controlling system of surface acoustic wave (SAW) using micro electromechanical structures, using a plate with periodic convex structures as a mechanical switch of the SAW's resonant condition. The effects of the geographical change on the substrate surface by the active control were investigated using the numerical analysis. And we verified the effect of spectrum shaping by the engraved grating structure, and the controlling effect of the resonant condition with the control plate on the grating structure experimentally.
AB - We have developed the dynamic controlling system of surface acoustic wave (SAW) using micro electromechanical structures, using a plate with periodic convex structures as a mechanical switch of the SAW's resonant condition. The effects of the geographical change on the substrate surface by the active control were investigated using the numerical analysis. And we verified the effect of spectrum shaping by the engraved grating structure, and the controlling effect of the resonant condition with the control plate on the grating structure experimentally.
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U2 - 10.1109/MEMSYS.2008.4443743
DO - 10.1109/MEMSYS.2008.4443743
M3 - Conference contribution
AN - SCOPUS:50149114326
SN - 9781424417933
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 661
EP - 664
BT - MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
T2 - 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Y2 - 13 January 2008 through 17 January 2008
ER -