A surface acoustic wave dynamics control device by grating structure

Masahiro Miyashita, Teppei Onuki, Sumito Nagasawa, Hiroshi Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We have developed the dynamic controlling system of surface acoustic wave (SAW) using micro electromechanical structures, using a plate with periodic convex structures as a mechanical switch of the SAW's resonant condition. The effects of the geographical change on the substrate surface by the active control were investigated using the numerical analysis. And we verified the effect of spectrum shaping by the engraved grating structure, and the controlling effect of the resonant condition with the control plate on the grating structure experimentally.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages661-664
Number of pages4
DOIs
Publication statusPublished - 2008
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ
Duration: 2008 Jan 132008 Jan 17

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CityTucson, AZ
Period08/1/1308/1/17

Fingerprint

Surface waves
Acoustic waves
Numerical analysis
Dynamical systems
Switches
Substrates

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Miyashita, M., Onuki, T., Nagasawa, S., & Kuwano, H. (2008). A surface acoustic wave dynamics control device by grating structure. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 661-664). [4443743] https://doi.org/10.1109/MEMSYS.2008.4443743

A surface acoustic wave dynamics control device by grating structure. / Miyashita, Masahiro; Onuki, Teppei; Nagasawa, Sumito; Kuwano, Hiroshi.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. p. 661-664 4443743.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Miyashita, M, Onuki, T, Nagasawa, S & Kuwano, H 2008, A surface acoustic wave dynamics control device by grating structure. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4443743, pp. 661-664, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443743
Miyashita M, Onuki T, Nagasawa S, Kuwano H. A surface acoustic wave dynamics control device by grating structure. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. p. 661-664. 4443743 https://doi.org/10.1109/MEMSYS.2008.4443743
Miyashita, Masahiro ; Onuki, Teppei ; Nagasawa, Sumito ; Kuwano, Hiroshi. / A surface acoustic wave dynamics control device by grating structure. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. pp. 661-664
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