A0.1 um Self-Aligned-Gate GaAs MESFETwith Multilayer Interconnection Structure for Ultra-High-Speed Ics

Masami Tokumitsu, Makoto Hirano, Taiichi Otsuji, Satoru Yamaguchi, Kimitoshi Yamazaki

    Research output: Contribution to journalArticlepeer-review

    17 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)211-214
    JournalIEEE IEDM Tch.Dig.
    Publication statusPublished - 1996 Apr 1

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