Adaptive control for micro/nano positioning system driven by piezo electric actuator

Xinkai Chen; Shengjun Wen; Dongyun Wang; Chun Yi Su

doi:10.1109/ISIE.2015.7281445

Adaptive control for micro/nano positioning system driven by piezo electric actuator

Xinkai Chen, Shengjun Wen, Dongyun Wang, Chun Yi Su

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

In this paper, a novel adaptive control law for the micro/nano positioning system is proposed, where the parameterized hysteresis model is employed. The formulated control law guarantees the global stability of the controlled positioning system, and the position error can be driven to approach to zero asymptotically. The advantage is that only the parameters needed in the control design are estimated online where the variation of the parameters can also be coped with, the real values of the parameters of the positioning system need to be neither identified nor measured, and good transient performance and good position tracking can be achieved. Experimental results show the effectiveness of the proposed method.

Original language	English
Title of host publication	IEEE International Symposium on Industrial Electronics
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	66-71
Number of pages	6
Volume	2015-September
ISBN (Print)	9781467375542
DOIs	https://doi.org/10.1109/ISIE.2015.7281445
Publication status	Published - 2015 Sep 28
Event	24th IEEE International Symposium on Industrial Electronics, ISIE 2015 - Buzios, Rio de Janeiro, Brazil Duration: 2015 Jun 3 → 2015 Jun 5

Other

Other	24th IEEE International Symposium on Industrial Electronics, ISIE 2015
Country	Brazil
City	Buzios, Rio de Janeiro
Period	15/6/3 → 15/6/5

Keywords

adaptive control
hysteresis
positioning system

ASJC Scopus subject areas

Electrical and Electronic Engineering
Control and Systems Engineering

Access to Document

10.1109/ISIE.2015.7281445

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Cite this

Chen, X., Wen, S., Wang, D., & Su, C. Y. (2015). Adaptive control for micro/nano positioning system driven by piezo electric actuator. In IEEE International Symposium on Industrial Electronics (Vol. 2015-September, pp. 66-71). [7281445] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISIE.2015.7281445

Adaptive control for micro/nano positioning system driven by piezo electric actuator. / Chen, Xinkai; Wen, Shengjun; Wang, Dongyun; Su, Chun Yi.

IEEE International Symposium on Industrial Electronics. Vol. 2015-September Institute of Electrical and Electronics Engineers Inc., 2015. p. 66-71 7281445.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Chen, X, Wen, S, Wang, D & Su, CY 2015, Adaptive control for micro/nano positioning system driven by piezo electric actuator. in IEEE International Symposium on Industrial Electronics. vol. 2015-September, 7281445, Institute of Electrical and Electronics Engineers Inc., pp. 66-71, 24th IEEE International Symposium on Industrial Electronics, ISIE 2015, Buzios, Rio de Janeiro, Brazil, 15/6/3. https://doi.org/10.1109/ISIE.2015.7281445

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abstract = "In this paper, a novel adaptive control law for the micro/nano positioning system is proposed, where the parameterized hysteresis model is employed. The formulated control law guarantees the global stability of the controlled positioning system, and the position error can be driven to approach to zero asymptotically. The advantage is that only the parameters needed in the control design are estimated online where the variation of the parameters can also be coped with, the real values of the parameters of the positioning system need to be neither identified nor measured, and good transient performance and good position tracking can be achieved. Experimental results show the effectiveness of the proposed method.",

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