Adaptive control for piezo-actuated nano-positioner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive sliding mode control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the adaptive control techniques, where the real value of the parameters of the stage need neither to be identified nor to be measured. The proposed control law ensures the global stability of the controlled nanopositioner, and the position error can be controlled to be as small as required by choosing the design parameters. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationIFAC Proceedings Volumes (IFAC-PapersOnline)
Pages1744-1749
Number of pages6
Volume15
EditionPART 1
DOIs
Publication statusPublished - 2009
Event15th IFAC Symposium on System Identification, SYSID 2009 - Saint-Malo
Duration: 2009 Jul 62009 Jul 8

Other

Other15th IFAC Symposium on System Identification, SYSID 2009
CitySaint-Malo
Period09/7/609/7/8

Fingerprint

Piezoelectric actuators
Hysteresis
Position control
Electric fuses
Sliding mode control
Friction

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Chen, X. (2009). Adaptive control for piezo-actuated nano-positioner. In IFAC Proceedings Volumes (IFAC-PapersOnline) (PART 1 ed., Vol. 15, pp. 1744-1749) https://doi.org/10.3182/20090706-3-FR-2004.0366

Adaptive control for piezo-actuated nano-positioner. / Chen, Xinkai.

IFAC Proceedings Volumes (IFAC-PapersOnline). Vol. 15 PART 1. ed. 2009. p. 1744-1749.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, X 2009, Adaptive control for piezo-actuated nano-positioner. in IFAC Proceedings Volumes (IFAC-PapersOnline). PART 1 edn, vol. 15, pp. 1744-1749, 15th IFAC Symposium on System Identification, SYSID 2009, Saint-Malo, 09/7/6. https://doi.org/10.3182/20090706-3-FR-2004.0366
Chen X. Adaptive control for piezo-actuated nano-positioner. In IFAC Proceedings Volumes (IFAC-PapersOnline). PART 1 ed. Vol. 15. 2009. p. 1744-1749 https://doi.org/10.3182/20090706-3-FR-2004.0366
Chen, Xinkai. / Adaptive control for piezo-actuated nano-positioner. IFAC Proceedings Volumes (IFAC-PapersOnline). Vol. 15 PART 1. ed. 2009. pp. 1744-1749
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