Adaptive control for piezo-actuated nano-positioner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive sliding mode control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the adaptive control techniques, where the real value of the parameters of the stage need neither to be identified nor to be measured. The proposed control law ensures the global stability of the controlled nanopositioner, and the position error can be controlled to be as small as required by choosing the design parameters. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication15th Symposium on System Identification, SYSID 2009 - Preprints
Pages1744-1749
Number of pages6
EditionPART 1
DOIs
Publication statusPublished - 2009 Dec 1
Event15th IFAC Symposium on System Identification, SYSID 2009 - Saint-Malo, France
Duration: 2009 Jul 62009 Jul 8

Publication series

NameIFAC Proceedings Volumes (IFAC-PapersOnline)
NumberPART 1
Volume15
ISSN (Print)1474-6670

Conference

Conference15th IFAC Symposium on System Identification, SYSID 2009
CountryFrance
CitySaint-Malo
Period09/7/609/7/8

ASJC Scopus subject areas

  • Control and Systems Engineering

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  • Cite this

    Chen, X. (2009). Adaptive control for piezo-actuated nano-positioner. In 15th Symposium on System Identification, SYSID 2009 - Preprints (PART 1 ed., pp. 1744-1749). (IFAC Proceedings Volumes (IFAC-PapersOnline); Vol. 15, No. PART 1). https://doi.org/10.3182/20090706-3-FR-2004.0366