Adaptive control for piezo-Actuated stage

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezo-Actuated XY-Table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-Table is a challenging task. This paper discusses the high precision adaptive control for the XY-Table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication1st International Conference on Industrial Artificial Intelligence, IAI 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728135939
DOIs
Publication statusPublished - 2019 Jul
Event1st International Conference on Industrial Artificial Intelligence, IAI 2019 - Shenyang, China
Duration: 2019 Jul 222019 Jul 26

Publication series

Name1st International Conference on Industrial Artificial Intelligence, IAI 2019

Conference

Conference1st International Conference on Industrial Artificial Intelligence, IAI 2019
CountryChina
CityShenyang
Period19/7/2219/7/26

Fingerprint

Piezoelectric actuators
Hysteresis
Friction

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Artificial Intelligence
  • Computer Science Applications
  • Industrial and Manufacturing Engineering
  • Control and Optimization

Cite this

Chen, X. (2019). Adaptive control for piezo-Actuated stage. In 1st International Conference on Industrial Artificial Intelligence, IAI 2019 [8850789] (1st International Conference on Industrial Artificial Intelligence, IAI 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICIAI.2019.8850789

Adaptive control for piezo-Actuated stage. / Chen, Xinkai.

1st International Conference on Industrial Artificial Intelligence, IAI 2019. Institute of Electrical and Electronics Engineers Inc., 2019. 8850789 (1st International Conference on Industrial Artificial Intelligence, IAI 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, X 2019, Adaptive control for piezo-Actuated stage. in 1st International Conference on Industrial Artificial Intelligence, IAI 2019., 8850789, 1st International Conference on Industrial Artificial Intelligence, IAI 2019, Institute of Electrical and Electronics Engineers Inc., 1st International Conference on Industrial Artificial Intelligence, IAI 2019, Shenyang, China, 19/7/22. https://doi.org/10.1109/ICIAI.2019.8850789
Chen X. Adaptive control for piezo-Actuated stage. In 1st International Conference on Industrial Artificial Intelligence, IAI 2019. Institute of Electrical and Electronics Engineers Inc. 2019. 8850789. (1st International Conference on Industrial Artificial Intelligence, IAI 2019). https://doi.org/10.1109/ICIAI.2019.8850789
Chen, Xinkai. / Adaptive control for piezo-Actuated stage. 1st International Conference on Industrial Artificial Intelligence, IAI 2019. Institute of Electrical and Electronics Engineers Inc., 2019. (1st International Conference on Industrial Artificial Intelligence, IAI 2019).
@inproceedings{8df2f01f4d284983b1baa56a7bc5e5a8,
title = "Adaptive control for piezo-Actuated stage",
abstract = "The piezo-Actuated XY-Table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-Table is a challenging task. This paper discusses the high precision adaptive control for the XY-Table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.",
author = "Xinkai Chen",
year = "2019",
month = "7",
doi = "10.1109/ICIAI.2019.8850789",
language = "English",
series = "1st International Conference on Industrial Artificial Intelligence, IAI 2019",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "1st International Conference on Industrial Artificial Intelligence, IAI 2019",

}

TY - GEN

T1 - Adaptive control for piezo-Actuated stage

AU - Chen, Xinkai

PY - 2019/7

Y1 - 2019/7

N2 - The piezo-Actuated XY-Table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-Table is a challenging task. This paper discusses the high precision adaptive control for the XY-Table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

AB - The piezo-Actuated XY-Table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-Table is a challenging task. This paper discusses the high precision adaptive control for the XY-Table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

UR - http://www.scopus.com/inward/record.url?scp=85073504090&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85073504090&partnerID=8YFLogxK

U2 - 10.1109/ICIAI.2019.8850789

DO - 10.1109/ICIAI.2019.8850789

M3 - Conference contribution

AN - SCOPUS:85073504090

T3 - 1st International Conference on Industrial Artificial Intelligence, IAI 2019

BT - 1st International Conference on Industrial Artificial Intelligence, IAI 2019

PB - Institute of Electrical and Electronics Engineers Inc.

ER -