Adaptive control for piezo-actuated XY-table

Xinkai Chen, Makoto Hattori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Pages2089-2094
Number of pages6
DOIs
Publication statusPublished - 2011
Event2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 - Beijing
Duration: 2011 Aug 72011 Aug 10

Other

Other2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
CityBeijing
Period11/8/711/8/10

Fingerprint

Piezoelectric actuators
Hysteresis
Friction

Keywords

  • high precision control
  • hysteresis
  • piezo electric actuators
  • XY-table

ASJC Scopus subject areas

  • Artificial Intelligence
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Chen, X., & Hattori, M. (2011). Adaptive control for piezo-actuated XY-table. In 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 (pp. 2089-2094). [5986303] https://doi.org/10.1109/ICMA.2011.5986303

Adaptive control for piezo-actuated XY-table. / Chen, Xinkai; Hattori, Makoto.

2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011. 2011. p. 2089-2094 5986303.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, X & Hattori, M 2011, Adaptive control for piezo-actuated XY-table. in 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011., 5986303, pp. 2089-2094, 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011, Beijing, 11/8/7. https://doi.org/10.1109/ICMA.2011.5986303
Chen X, Hattori M. Adaptive control for piezo-actuated XY-table. In 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011. 2011. p. 2089-2094. 5986303 https://doi.org/10.1109/ICMA.2011.5986303
Chen, Xinkai ; Hattori, Makoto. / Adaptive control for piezo-actuated XY-table. 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011. 2011. pp. 2089-2094
@inproceedings{c83f794fa9b54878be338182f27dfa29,
title = "Adaptive control for piezo-actuated XY-table",
abstract = "The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.",
keywords = "high precision control, hysteresis, piezo electric actuators, XY-table",
author = "Xinkai Chen and Makoto Hattori",
year = "2011",
doi = "10.1109/ICMA.2011.5986303",
language = "English",
isbn = "9781424481149",
pages = "2089--2094",
booktitle = "2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011",

}

TY - GEN

T1 - Adaptive control for piezo-actuated XY-table

AU - Chen, Xinkai

AU - Hattori, Makoto

PY - 2011

Y1 - 2011

N2 - The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

AB - The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

KW - high precision control

KW - hysteresis

KW - piezo electric actuators

KW - XY-table

UR - http://www.scopus.com/inward/record.url?scp=81055123993&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=81055123993&partnerID=8YFLogxK

U2 - 10.1109/ICMA.2011.5986303

DO - 10.1109/ICMA.2011.5986303

M3 - Conference contribution

SN - 9781424481149

SP - 2089

EP - 2094

BT - 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011

ER -