Adaptive control for piezo-actuated XY-table

Xinkai Chen, Makoto Hattori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publication2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Pages2089-2094
Number of pages6
DOIs
Publication statusPublished - 2011 Nov 17
Event2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 - Beijing, China
Duration: 2011 Aug 72011 Aug 10

Publication series

Name2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011

Conference

Conference2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
CountryChina
CityBeijing
Period11/8/711/8/10

    Fingerprint

Keywords

  • XY-table
  • high precision control
  • hysteresis
  • piezo electric actuators

ASJC Scopus subject areas

  • Artificial Intelligence
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Chen, X., & Hattori, M. (2011). Adaptive control for piezo-actuated XY-table. In 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 (pp. 2089-2094). [5986303] (2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011). https://doi.org/10.1109/ICMA.2011.5986303