Adaptive high precision control for piezo-actuated nano-positioner

Toshikuni Ozaki, Xinkai Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl- Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationIEEE International Symposium on Intelligent Control - Proceedings
Pages2278-2283
Number of pages6
DOIs
Publication statusPublished - 2010
Event2010 IEEE International Symposium on Intelligent Control, ISIC 2010 - Yokohama
Duration: 2010 Sep 82010 Sep 10

Other

Other2010 IEEE International Symposium on Intelligent Control, ISIC 2010
CityYokohama
Period10/9/810/9/10

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ASJC Scopus subject areas

  • Computer Science Applications
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Modelling and Simulation

Cite this

Ozaki, T., & Chen, X. (2010). Adaptive high precision control for piezo-actuated nano-positioner. In IEEE International Symposium on Intelligent Control - Proceedings (pp. 2278-2283). [5612884] https://doi.org/10.1109/ISIC.2010.5612884