TY - GEN
T1 - Adaptive high precision control for piezo-actuated nano-positioner
AU - Ozaki, Toshikuni
AU - Chen, Xinkai
PY - 2010/11/30
Y1 - 2010/11/30
N2 - The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl- Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.
AB - The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl- Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.
UR - http://www.scopus.com/inward/record.url?scp=78649377197&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78649377197&partnerID=8YFLogxK
U2 - 10.1109/ISIC.2010.5612884
DO - 10.1109/ISIC.2010.5612884
M3 - Conference contribution
AN - SCOPUS:78649377197
SN - 9781424453603
T3 - IEEE International Symposium on Intelligent Control - Proceedings
SP - 2278
EP - 2283
BT - 2010 IEEE International Symposium on Intelligent Control, ISIC 2010
T2 - 2010 IEEE International Symposium on Intelligent Control, ISIC 2010
Y2 - 8 September 2010 through 10 September 2010
ER -